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Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope
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10.1063/1.2403839
/content/aip/journal/rsi/78/1/10.1063/1.2403839
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/1/10.1063/1.2403839
/content/aip/journal/rsi/78/1/10.1063/1.2403839
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/content/aip/journal/rsi/78/1/10.1063/1.2403839
2007-01-11
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Feedforward control of a closed-loop piezoelectric translation stage for atomic force microscope
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/1/10.1063/1.2403839
10.1063/1.2403839
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