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Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
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Figures

Image of FIG. 1.

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FIG. 1.

(Color online) The whole KRISS laser writing system with cylindrical/circular coordinates. The figure in the box indicates the power stabilization part.

Image of FIG. 2.

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FIG. 2.

Experimental setup to realize the output power stabilization: AOM, acousto-optic modulator; A, aperture; BS, beam splitter; LP1 and LP2, linear polarizers; PD1 and PD2, photodetectors. The circular arrows in front of two LPs indicate the rotations of LPs to reduce the beam power.

Image of FIG. 3.

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FIG. 3.

(Color online) Relative intensity noise of the laser with three different conditions: free running (blue colored), control on (red colored), and no signal detection (green colored). Free-running mode shows the main noise frequency band of the used laser.

Image of FIG. 4.

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FIG. 4.

(Color online) Stability of the laser before and after operating the control loop. Its improved stability is sufficient for our system to use the LWS. This stability is based on rms value.

Image of FIG. 5.

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FIG. 5.

(Color online) Stability of internal mirror He–Ne laser before and after operating the control loop. This stability is based on rms value.

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/content/aip/journal/rsi/78/10/10.1063/1.2801012
2007-10-31
2014-04-17

Abstract

We present experimental results on the output power stabilization of an laser for a direct laser writing system (LWS). Instability of the laser output power in the LWS cause resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-opticmodulator, a photodetector, and a servo controller. In this system, we have achieved the stability of for and the relative intensity noise level of at . In addition, we applied our system to a internal mirror He–Ne laser. As a consequence, we achieved the output power stability of for .

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Scitation: Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/10/10.1063/1.2801012
10.1063/1.2801012
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