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Laser output power stabilization for direct laser writing system by using an acousto-optic modulator
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We present experimental results on the output power stabilization of an laser for a direct laser writing system (LWS). Instability of the laser output power in the LWS cause resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-opticmodulator, a photodetector, and a servo controller. In this system, we have achieved the stability of for and the relative intensity noise level of at . In addition, we applied our system to a internal mirror He–Ne laser. As a consequence, we achieved the output power stability of for .
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