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Highly sensitive silicon crystal torque sensor operating at the thermal noise limit
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10.1063/1.2437133
/content/aip/journal/rsi/78/2/10.1063/1.2437133
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/2/10.1063/1.2437133
/content/aip/journal/rsi/78/2/10.1063/1.2437133
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/content/aip/journal/rsi/78/2/10.1063/1.2437133
2007-02-07
2014-07-13
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Highly sensitive silicon crystal torque sensor operating at the thermal noise limit
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/2/10.1063/1.2437133
10.1063/1.2437133
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