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Sectioning of multilayers to make a multilayer Laue lens
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Image of FIG. 1.
FIG. 1.

Schematic illustrations of the fabrication steps of the MLL.

Image of FIG. 2.
FIG. 2.

SEM image of the damage generated during the dicing process.

Image of FIG. 3.
FIG. 3.

SEM images taken from multilayer cross sections produced by [(a) and (b)] mechanical polishing and [(c) and (d)] mechanical polishing, ion-beam polishing, and final manual polishing. The images in (b) and (d) show a side edge, while those in (a) and (c) show a region away from the edge. A distorted region in (a) is indicated by an arrow. The arrows in (b) and (d) indicate bent layers that are generated during side polishing. After the procedure including ion-beam polishing, the entire cross-sectioned surface is damage-free except within of the sides.

Image of FIG. 4.
FIG. 4.

(a) Schematic illustration of a wedge sample used for x-ray diffraction and focusing measurements. A typical wedge has section depths ranging from that are optimum for x-ray energies from . (b) A typical rocking curve at the first order diffraction peak in the transmission Laue geometry. From the period of the interference fringes, , one can obtain the section depth as .


Generic image for table
Table I.

Dicing blade type and system parameters used for cutting a MLL.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sectioning of multilayers to make a multilayer Laue lens