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Volume 78, Issue 6, June 2007
Analysis of the Raman Stokes peak position and its shift has been frequently used to estimate either temperature or stress in microelectronics and microelectromechanical systemdevices. However, if both fields are evolving simultaneously, the Stokes shift represents a convolution of these effects, making it difficult to measure either quantity accurately. By using the relative independence of the Stokes linewidth to applied stress, it is possible to deconvolve the signal into an estimation of both temperature and stress. Using this property, a method is presented whereby the temperature and stress were simultaneously measured in doped polysilicon microheaters. A data collection and analysis method was developed to reduce the uncertainty in the measured stresses resulting in an accuracy of for an average applied stress of and temperature of . Measurement results were compared to three-dimensional finite-element analysis of the microheaters and were shown to be in excellent agreement. This analysis shows that Raman spectroscopy has the potential to measure both evolving temperature and stress fields in devices using a single optical measurement.
- PARTICLE SOURCES, OPTICS AND ACCELERATION; PARTICLE DETECTORS
78(2007); http://dx.doi.org/10.1063/1.2745234View Description Hide Description
A method for using charge injection devices (CIDs) for detection of high-energy charged particles from inertial-confinement fusion reactions is described. Because of the relatively small depletion region of the CID camera (depletion depth of ), aluminum foils are placed in front of the device to reduce the energy of the charged particles and maximize the energy deposited in the CID. Simultaneous measurements of protons with a CID and a surface barrier detector indicate that the CID is an efficient detector of charged fusion products. Tests using high energy alpha particles emitted from a radium-226 source are also reported.