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High-throughput combinatorial study of local stress in thin film composition spreads
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10.1063/1.2755779
/content/aip/journal/rsi/78/7/10.1063/1.2755779
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/7/10.1063/1.2755779
/content/aip/journal/rsi/78/7/10.1063/1.2755779
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/content/aip/journal/rsi/78/7/10.1063/1.2755779
2007-07-12
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-throughput combinatorial study of local stress in thin film composition spreads
http://aip.metastore.ingenta.com/content/aip/journal/rsi/78/7/10.1063/1.2755779
10.1063/1.2755779
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