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Getter sputtering system for high-throughput fabrication of composition spreads
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) (a) The three custom substrate heaters on their rotating mounting plate are pictured with the ion gun, gun, and four-gun assembly as positioned in the deposition system. (b) A detailed look at the arrangement of the four-gun assembly.

Image of FIG. 2.
FIG. 2.

(Color online) (a) The custom heater box is shown with the substrate holder plate. Dimensions for the heater box and for the positions of the three lamps with respect to the plane of the substrate are given. The lamps are inserted into the larger (“8”-shaped) holes. (b) This side view of the heater shows the position of the center lamp with respect to the outer lamps. Inserting the center lamp in the opposite side from the two outer lamps provides a separation between the center of the inner and outer lamps.

Image of FIG. 3.
FIG. 3.

(Color online) The inset shows four points at which thermocouples are cemented to a silicon wafer. The temperatures obtained from the four thermocouples are plotted as the substrate is heated by a custom heater under applied power. The beginning of the cooling profile is shown after of heating.

Image of FIG. 4.
FIG. 4.

(Color online) The at. % oxygen in sputtered titanium films, as determined by WDS measurements, is plotted for depositions both with and without the cryoshroud. The orientation of the gun allows for analysis of a range of deposition rates with a single deposition. Rates are quoted as monolayers of close packed titanium per second. Fitted functions and the ratio of at. % oxygen without the cryoshroud to that with the cryoshroud are also plotted.

Image of FIG. 5.
FIG. 5.

(Color online) (a) A fluorescence image taken during electrochemical testing of the film is shown in the outline of the substrate. The image was taken with a potential of vs applied to the film, revealing catalytically active regions in the center and low right. The orientation of the three confocally tilted guns is portrayed by the symbols of the target elements. (b) The region of composition space covered by the film is the dome-shaped surface in Pt-Pb-Ti-Co composition space. The projection of this surface onto the Pb-Ti-Co composition space is also shown. (c) The intensity of the fluorescence image is mapped onto a ternary composition plot, showing the optimal Pb:Ti:Co atomic ratios.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Getter sputtering system for high-throughput fabrication of composition spreads