Schematic of the Cassegrain telescope and the tandem Wadsworth spectrometer. The blaze directions of the two gratings are indicated by the arrows.
Blur spot diagrams for 165 nm wavelength and source positions up to 1 mm off axis. The source and image positions (in mm relative to the on-axis positions) are shown above and below the spot diagrams, respectively. The diffraction limited diameter is also indicated.
The dispersed spectral images for the indicated wavelengths, where the source object is the letter F that is 1 mm tall in the source plane.
Measured reflectances at the indicated angles of incidence of (a) the witness mirror and the turning mirror, (b) the primary mirror, and (c) the secondary mirror.
Schematic of the 1800 grooves/mm grating and the diffraction of 165 nm TM polarized radiation incident at an angle of . The blaze direction is indicated by the arrow.
Detector scans indicating the dispersion by grating 1 measured at incidence and for wavelengths in the 124–155 nm range. The and zero orders are indicated. The feature near zero detector angle is a glint from the detector, as it crosses through the incident beam, that is reflected by the grating back into the detector.
The measured efficiencies of gratings 1 and 2 at (a) and angles of incidence and at the centers of each grating and (b) at incidence and at five locations on each grating.
The measured efficiencies of gratings 1 and 2 at angle of incidence and at five locations on each grating.
The zero order and order efficiencies calculated for the 1800 grooves/mm grating, TM and TE polarized radiation incident at , blaze angle, and variable opposite facet angle. The data point indicates the measured order efficiency of 80% TM polarized radiation incident at .
(a) The calculated zero order and order efficiencies of TM and TE polarized radiations incident at . The data points indicate the zero order efficiency of 80% TM polarized radiation measured at incidence. The Rayleigh wavelengths are also indicated. (b) The ratio of the order and zero order efficiencies calculated for 80% TM radiation incident at . The data points are the measured values derived from Fig. 6.
The calculated zero order and order efficiencies of TM and TE polarized radiations incident at . The Rayleigh wavelengths are indicated.
(a) The reflectances of the primary, secondary, and turning mirrors, the efficiencies of the spectrometer’s first and second gratings, and the transmittance of the quartz window. (b) The product of the six curves in (a).
Spectral images recorded using the 470 grooves/mm gratings and (a) the HeNe laser source and (b) the Hg lamp source. (c) Spectral image recorded from a CH foil target irradiated by 36 NIKE laser beams and using the 1800 grooves/mm gratings. The position of the linear array of ten photodiodes is indicated.
Spectra from Zr and BN targets irradiated by the small KrF laser and recorded using the 1800 grooves/mm gratings. Portions of the spectral images are shown below the spectra.
Spectra from Zr and Co foil targets irradiated by the small KrF laser and recorded using the 1200 grooves/mm gratings. The 248.55 nm central wavelength of the KrF laser is indicated.
Signal from the silicon photodiode generated by irradiating a CH foil target by 36 NIKE laser beams.
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