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Compact electron beam ion sources/traps: Review and prospects (invited)a)
a)Invited paper, published as part of the Proceedings of the 12th International Conference on Ion Sources, Jeju, Korea, August 2007.
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10.1063/1.2804901
/content/aip/journal/rsi/79/2/10.1063/1.2804901
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/2/10.1063/1.2804901

Figures

Image of FIG. 1.
FIG. 1.

Design of the three ion source generations: Dresden EBIT, Dresden EBIS, and Dresden EBIS-A.

Image of FIG. 2.
FIG. 2.

Scheme of the Dresden EBIT with electrical shielding.

Image of FIG. 3.
FIG. 3.

Scatter plot of the x rays from direct excitation processes of xenon.

Image of FIG. 4.
FIG. 4.

Xenon ions extracted from the Dresden EBIT (, , , gas: Xe-129) and the Dresden EBIS-A (, , , gas: natural isotope mixture), respectively. The spectra are measured at different beamlines with different analyzing magnets.

Image of FIG. 5.
FIG. 5.

SEM image of an edge structure of a silicon sample by scanning the helium beam.

Image of FIG. 6.
FIG. 6.

Transmission electron microscopy image of a HOPG sample irradiated with ions.

Tables

Generic image for table
Table I.

Basic parameters of cryogenic and room-temperature EBIT.

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Table II.

Parameters of the Dresden EBIT/EBIS ion source family. : magnetic induction on the axis; : highest reached electron beam current (the used cathode diameter is given in parenthesis); : highest measured electron current density; : highest reached electron beam energy.

Generic image for table
Table III.

Ion production in the ion sources of the Dresden EBIT/EBIS family (selected milestones).

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Table IV.

Number of ions produced in the ion sources of the Dresden EBIT/EBIS family (selected values).

Generic image for table
Table V.

Projected parameters of the Dresden EBIS-SC.

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/content/aip/journal/rsi/79/2/10.1063/1.2804901
2008-02-06
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Compact electron beam ion sources/traps: Review and prospects (invited)a)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/2/10.1063/1.2804901
10.1063/1.2804901
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