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Development of plasma ion source for time-of-flight secondary ion mass spectrometry applicationsa)
a)Contributed paper, published as part of the Proceedings of the 12th International Conference on Ion Sources, Jeju, Korea, August 2007.
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10.1063/1.2804912
/content/aip/journal/rsi/79/2/10.1063/1.2804912
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/2/10.1063/1.2804912
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic diagram of the multicusp dc filament discharge ion source for ion production and the mass spectrometer system (not to scale) and (b) a photo of the ion source.

Image of FIG. 2.
FIG. 2.

Mass spectrum of positive ions extracted from the source.

Image of FIG. 3.
FIG. 3.

Mass spectrum of negative ions extracted from the source.

Image of FIG. 4.
FIG. 4.

(a) current increases with the extraction voltage, at a fixed source pressure of , discharge voltage of , and discharge current of . (b) current decreases with the source pressure, at a fixed extraction voltage at .

Image of FIG. 5.
FIG. 5.

(a) current increases with the extraction voltage, at a fixed source pressure of , discharge voltage of , and discharge current of . (b) current vs the source pressure, at a fixed extraction voltage at .

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/content/aip/journal/rsi/79/2/10.1063/1.2804912
2008-02-06
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of C60 plasma ion source for time-of-flight secondary ion mass spectrometry applicationsa)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/2/10.1063/1.2804912
10.1063/1.2804912
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