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Structure of the fabricated equipment to generate the solidified Ar target.
Peaks of Ar ions with the EIA voltage of measured by the SEM generated by laser irradiation.
Ion currents measured by the FC.
Kinetic energy and pulse width of the each charge state ion induced by laser irradiation.
Charge state distributions. Total ion numbers involved in the pulse wave forms measured by the FC are of Ne, of Ar, and of Ar ions with the laser energies of 1200, 1200, and .
Variation of the time structures of laser pulses measured by a photodiode.
Laser irradiation conditions.
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