1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Vacuum ellipsometry as a method for probing glass transition in thin polymer films
Rent:
Rent this article for
USD
10.1063/1.2901601
/content/aip/journal/rsi/79/4/10.1063/1.2901601
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/4/10.1063/1.2901601

Figures

Image of FIG. 1.
FIG. 1.

Sketch of the optical chamber. The part of the vacuum line with the ionization gauge is shown also on the left side (both side and top view). 1: sample holder; 2: sample (polymer coated silicon wafer); 3: probing light beam; 4: heaters; 5: RTD; 6: copper braid; 7: head of the chamber; 8: optical window assemblies; 9: silica windows; 10: trap; 11: the cold surface of the trap; 12: electrical feedthrough outlet; 13: vacuum line; 14: ionization gauge.

Image of FIG. 2.
FIG. 2.

Mass spectra of the residual gas in the case of a warm (bars) and cold (diamonds) traps. The residual gas pressures are and , respectively.

Image of FIG. 3.
FIG. 3.

Derivative plots for thick PS film (average from six scans) and thick PMMA film (average from 14 scans). Solid line denotes cooling curve and dashed line denotes heating curves.

Image of FIG. 4.
FIG. 4.

Heating plot and construction for calculation, thick PS film, averaged from six scans. denotes the area of the figure; points A and E lie on the linear part of the curve D.

Image of FIG. 5.
FIG. 5.

Derivative plots for a thick PS film. Heating and cooling curves at high vacuum at room temperature), averaged from 15 scans, are shown by △ and ▽ symbols, respectively. Low vacuum heating and cooling curves, averaged from four scans, are shown by ▲ and ▼ symbols, respectively.

Image of FIG. 6.
FIG. 6.

and plots for a bare Si substrate at high vacuum at room temperature), averaged from ten scans. Heating and cooling curves are shown by dashed and solid lines, respectively. Heating and cooling plots are shown by △ and ▲ symbols, respectively.

Image of FIG. 7.
FIG. 7.

Systematic change of with time upon annealing and thermal cycling (upper curve). The IG is turned on during the experiment. The sample is a thick PMMA film on Si. The corresponding temperature program is shown by the lower curve.

Image of FIG. 8.
FIG. 8.

Derivative plots for the same sample as in Fig. 7. Filled and open symbols denote cooling and heating curves, respectively.

Image of FIG. 9.
FIG. 9.

AFM image of the thick PS sample (a) as spin coated and (b) after a typical annealing and temperature cycling experiment (the IG is switched on).

Image of FIG. 10.
FIG. 10.

Forced warming of the trap during the temperature program (the bottom curve) for thick PMMA film. The IG is turned on. and residual gas pressure as functions of time are shown by the top and middle curves, respectively.

Image of FIG. 11.
FIG. 11.

Slow release of the trapped residual gas during annealing of a thick PS film at . Residual gas pressure (lower curve) and (upper curve) vs time are shown.

Image of FIG. 12.
FIG. 12.

Residual gas composition during slow release of the trapped residual gas. The top line and symbol curve shows the residual gas pressure. Species , , , and are denoted by dashed, solid, dotted, and dash-dot lines, respectively.

Image of FIG. 13.
FIG. 13.

Derivative plot for a thick PMMA film on Si, obtained upon heating (average from 12 scans).

Tables

Generic image for table
Table I.

Characteristics of polymers.

Loading

Article metrics loading...

/content/aip/journal/rsi/79/4/10.1063/1.2901601
2008-04-17
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Vacuum ellipsometry as a method for probing glass transition in thin polymer films
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/4/10.1063/1.2901601
10.1063/1.2901601
SEARCH_EXPAND_ITEM