Basic experimental configuration for all deposition experiments. Vacuum chamber is held at or , depending on the experiment.
(a) The most distinct dielectric islands resulted from the use of mesh B, with diameter holes and uniform hole spacing. (b) The colorful rainbow pattern seen in each island is an effect known as Newton’s Rings and results from a variation in the dielectric thickness. (c) A change in lighting angle reveals the particulate present throughout the dielectric islands.
Single crystal MgO target used for fabrication of MOJ-06. The green ablation plume is clearly visible in the vacuum.
SEM image of particulate on the dielectric surface. Particulate ranges in size from tens of microns to tens of nanometers in diameter.
XEDS spectra of the interior of a single piece of particulate, as well as the bulk hafnium oxide film. The composition of the particulate clearly contains much less oxygen than the bulk film, indicating minimal oxidation. Note the breaks in the axes at and 900 counts.
Photograph of the UM/L-3 Titan relativistic magnetron. The three waveguides each contain a directional coupler and are terminated in a water load.
Generation one of the MOJ cathodes, with polished stainless steel (PSS1) and dielectric coated cathodes shown for comparison.
Generation two of the MOJ cathodes, with MOJ-01b and MIO cathodes shown for comparison. MOJ-01b is the second test of the MOJ-01 cathode, and MIO is the metal-island only cathode.
Summary of relevant MOJ cathode parameters. The current density indicates additional current emitted beyond the stainless steel baseline. Italicized text for the MIO cathode indicates the values refer to Hf metal, rather than dielectric. indicates a reduction in current.
Article metrics loading...
Full text loading...