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Experimental setup for characterization of self-actuated microcantilevers with piezoresistive readout for chemical recognition of volatile substances
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10.1063/1.2976038
/content/aip/journal/rsi/79/9/10.1063/1.2976038
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/9/10.1063/1.2976038
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Figures

Image of FIG. 1.
FIG. 1.

A microcantilever with integrated piezoresistive readout and self-actuation. The cantilever beam dimensions are as follows: length , width , and thickness .

Image of FIG. 2.
FIG. 2.

General view of the experimental setup.

Image of FIG. 3.
FIG. 3.

Schematic diagram of the experimental setup.

Image of FIG. 4.
FIG. 4.

Teflon measurement cell applicable for either gas single injection or gas flow mode.

Image of FIG. 5.
FIG. 5.

Golden spring contacts to the cantilever units.

Image of FIG. 6.
FIG. 6.

Cantilever cell (right) directly connected to the preamplifier module (left).

Image of FIG. 7.
FIG. 7.

Control and signal processing module.

Image of FIG. 8.
FIG. 8.

Block diagram of the acquisition and control electronics.

Image of FIG. 9.
FIG. 9.

Screenshot of the software working panel with six self-actuated piezoresistive cantilevers being scanned over a frequency range.

Image of FIG. 10.
FIG. 10.

Experimentally measured eigenfrequencies of an uncoated self-actuated piezoresistive cantilever. Frequency of the excitation voltage is plotted along the -axis.

Image of FIG. 11.
FIG. 11.

Screenshot of simultaneous measurements of the resonance frequency and the offset voltage with a cantilever exposed to variable concentrations (in ) of water.

Image of FIG. 12.
FIG. 12.

From the bottom to the top: amplitude spectrum, phase spectrum, and the phase shift in time domain gathered from a single self-actuated piezoresistive cantilever.

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/content/aip/journal/rsi/79/9/10.1063/1.2976038
2008-09-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental setup for characterization of self-actuated microcantilevers with piezoresistive readout for chemical recognition of volatile substances
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/9/10.1063/1.2976038
10.1063/1.2976038
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