A microcantilever with integrated piezoresistive readout and self-actuation. The cantilever beam dimensions are as follows: length , width , and thickness .
General view of the experimental setup.
Schematic diagram of the experimental setup.
Teflon measurement cell applicable for either gas single injection or gas flow mode.
Golden spring contacts to the cantilever units.
Cantilever cell (right) directly connected to the preamplifier module (left).
Control and signal processing module.
Block diagram of the acquisition and control electronics.
Screenshot of the software working panel with six self-actuated piezoresistive cantilevers being scanned over a frequency range.
Experimentally measured eigenfrequencies of an uncoated self-actuated piezoresistive cantilever. Frequency of the excitation voltage is plotted along the -axis.
Screenshot of simultaneous measurements of the resonance frequency and the offset voltage with a cantilever exposed to variable concentrations (in ) of water.
From the bottom to the top: amplitude spectrum, phase spectrum, and the phase shift in time domain gathered from a single self-actuated piezoresistive cantilever.
Article metrics loading...
Full text loading...