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Use of multiwavelength emission from hollow cathode lamp for measurement of state resolved atom density of metal vapor produced by electron beam evaporation
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10.1063/1.2987689
/content/aip/journal/rsi/79/9/10.1063/1.2987689
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/9/10.1063/1.2987689

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of system for atom density measurement by absorption spectroscopy (b) inside view of the chamber.

Image of FIG. 2.
FIG. 2.

Emission line profile from hollow cathode discharge lamp at 591.5 nm.

Image of FIG. 3.
FIG. 3.

Dependence of metastable state/ground state atom density on surface temperature. Theoretically estimated Boltzmann distribution is also plotted.

Image of FIG. 4.
FIG. 4.

Atom density distribution profile along the width of the atomic beam.

Image of FIG. 5.
FIG. 5.

A comparison of measurement of total atom density by atomic absorption and deposition methods and calculations. Measurement done at a height of 300 mm from the crucible.

Tables

Generic image for table
Table I.

Energy levels, wavelengths of the emission used in absorption experiment, and atom density at a temperature of 2940 K. The maximum uncertainty (Ref. 35) in the gf values is 20%.

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/content/aip/journal/rsi/79/9/10.1063/1.2987689
2008-09-24
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Use of multiwavelength emission from hollow cathode lamp for measurement of state resolved atom density of metal vapor produced by electron beam evaporation
http://aip.metastore.ingenta.com/content/aip/journal/rsi/79/9/10.1063/1.2987689
10.1063/1.2987689
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