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Effects of anisotropic material property on the spring constant and the resonant frequency of atomic force microscope cantilever
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10.1063/1.3115212
/content/aip/journal/rsi/80/4/10.1063/1.3115212
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/4/10.1063/1.3115212

Figures

Image of FIG. 1.
FIG. 1.

(a) Analytical model of crystal silicon unit cell and its coordinate system. (b) Schematic of AFM cantilever and coordinate system used in finite element analysis; the axis is the cantilever axis. (c) Definition of cantilever-crystal angle of AFM cantilever.

Image of FIG. 2.
FIG. 2.

Equivalent isotropic Young’s modulus of crystal silicon vs cantilever-crystal angle .

Image of FIG. 3.
FIG. 3.

Finite element model of (a) NANOWORLD AT/CONT20 rectangular cantilever and (b) NANOSENSORS ATEC-NC AFM cantilever.

Image of FIG. 4.
FIG. 4.

Lateral spring constants of NANOWORLD AT/CONT20 rectangular cantilever under isotropic and anisotropic assumptions. ○ finite element results under anisotropic assumption. × finite element results under isotropic assumption.

Image of FIG. 5.
FIG. 5.

Comparison between theoretical and finite element results of lateral spring constant of NANOWORLD AT/CONT20 rectangular cantilever.

Image of FIG. 6.
FIG. 6.

Axial spring constant of NANOWORLD AT/CONT20 rectangular cantilever vs cantilever-crystal angle .

Image of FIG. 7.
FIG. 7.

Bending spring constant vs cantilever-crystal angle . (a) NANOWORLD AT/CONT20 rectangular cantilever. (b) NANOSENSORS ATEC-NC cantilever.

Image of FIG. 8.
FIG. 8.

First resonant frequency of NANOWORLD AT/CONT20 rectangular cantilever vs cantilever-crystal angle .

Image of FIG. 9.
FIG. 9.

Bending spring constant vs cantilever-crystal angle of NANOWORLD AT/CONT20 rectangular cantilever obtained by different methods.

Tables

Generic image for table
Table I.

Values of parameters needed when using Eqs. (8) and (9) to find the spring constant and resonant frequency of rectangular AFM cantilevers, respectively.

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/content/aip/journal/rsi/80/4/10.1063/1.3115212
2009-04-13
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of anisotropic material property on the spring constant and the resonant frequency of atomic force microscope cantilever
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/4/10.1063/1.3115212
10.1063/1.3115212
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