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A control approach to cross-coupling compensation of piezotube scanners in tapping-mode atomic force microscope imaging
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10.1063/1.3124183
/content/aip/journal/rsi/80/4/10.1063/1.3124183
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/4/10.1063/1.3124183
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) The schematic of AFM system and (b) the cantilever oscillation during tapping-mode imaging.

Image of FIG. 2.
FIG. 2.

The block diagram of the feedback control system for vertical -axis in tapping-mode imaging.

Image of FIG. 3.
FIG. 3.

The block diagram of the proposed IIC-based approach to compensating for the cross-axis coupling effect.

Image of FIG. 4.
FIG. 4.

The topography (height) image of the PTR sample (a) with no bow compensation, (b) with the use of the proposed approach, and (c) with the image subtraction method, and (d)–(f) the corresponding cross-section plots, respectively. The lateral scan size is .

Image of FIG. 5.
FIG. 5.

The experimentally measured frequency response of the coupling dynamics from the lateral axis to the vertical axis.

Image of FIG. 6.
FIG. 6.

Comparison of the topography image (a) without and (b) with the use of the proposed approach. [(c) and (d)] the comparison of the corresponding cross-section plots. The lateral scan rate is 24.4 Hz.

Image of FIG. 7.
FIG. 7.

Comparison of (a) the topography image and (b) the tapping magnitude error image with (“With IIC”) and without (“Without IIC”) the use of the proposed approach, where the two images on the second row are the zoomed-in image of the sample area within the dashed box in the first row. [(c) and (d)] The comparison of the corresponding cross-section plots. The lateral scan size is and the scan rate is 12.2 Hz.

Image of FIG. 8.
FIG. 8.

(a) The topography image and (b) the tapping magnitude image of the hard-disk surface with one nanoparticle, both obtained with no ring compensation, where the inset is the zoomed-in image of the area within the dashed box. The comparison of the cross-section plot on the flat surface (red) with that on the nanoparticle (blue) on (c) the topography image and (d) the magnitude image. The lateral scan rate is 24.4 Hz.

Image of FIG. 9.
FIG. 9.

(a) The topography image and (b) the tapping magnitude image of the hard-disk surface with one nanoparticle, both obtained by using the proposed method, where the inset is the zoomed-in image of the area within the dashed box. Comparison of the cross-section plot on the flat surface (red) with that on the nanoparticle (blue) on (c) the topography image and (d) the magnitude image. The lateral scan rate is 24.4 Hz.

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/content/aip/journal/rsi/80/4/10.1063/1.3124183
2009-04-30
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A control approach to cross-coupling compensation of piezotube scanners in tapping-mode atomic force microscope imaging
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/4/10.1063/1.3124183
10.1063/1.3124183
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