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Magnetic field probes for use in radio frequency plasma
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10.1063/1.3136907
/content/aip/journal/rsi/80/5/10.1063/1.3136907
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/5/10.1063/1.3136907
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Low inductance resistor; impedance frequency response.

Image of FIG. 2.
FIG. 2.

Frequency response of resistor and coaxial alligator breakouts as measured with a function generator and oscilloscope.

Image of FIG. 3.
FIG. 3.

Illustration of inductive and capacitive signals present when magnetic field probes are used in plasma.

Image of FIG. 4.
FIG. 4.

Two -dot probes orientated 180° with respect to one another; signal is subtracted through CTT.

Image of FIG. 5.
FIG. 5.

CTT with -dot probes and differential voltage probe.

Image of FIG. 6.
FIG. 6.

Coil inductance and parasitic capacitance that will determine probe/coil resonance frequency.

Image of FIG. 7.
FIG. 7.

Impedance frequency response for twisted shielded pair and coaxial cable.

Image of FIG. 8.
FIG. 8.

Line length effect from probe to CTT.

Image of FIG. 9.
FIG. 9.

Two probe 180° spatial orientation; shown with twisted shielded leads to the CTT.

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/content/aip/journal/rsi/80/5/10.1063/1.3136907
2009-05-22
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Magnetic field probes for use in radio frequency plasma
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/5/10.1063/1.3136907
10.1063/1.3136907
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