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Automatic approaching method for atomic force microscope using a Gaussian laser beam
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10.1063/1.3181787
/content/aip/journal/rsi/80/7/10.1063/1.3181787
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/7/10.1063/1.3181787

Figures

Image of FIG. 1.
FIG. 1.

Schematic of a conventional AFM.

Image of FIG. 2.
FIG. 2.

Block diagram of a conventional AFM system.

Image of FIG. 3.
FIG. 3.

Block diagram of the proposed AFM control.

Image of FIG. 4.
FIG. 4.

Schematic diagram of the AFM optical system.

Image of FIG. 5.
FIG. 5.

Variation in the spot size of Gaussian Laser beam.

Image of FIG. 6.
FIG. 6.

Visual image of AFM. The boundary of cantilever, the spot size of Gaussian beam, and the region of a window are illustrated.

Image of FIG. 7.
FIG. 7.

Average intensity vs tip-sample distance.

Image of FIG. 8.
FIG. 8.

Simulation results of the average intensity for the different spot sizes of Gaussian laser beam.

Image of FIG. 9.
FIG. 9.

CCD images vs the tip-sample distance. Rectangular type [(a), (b), (e), (f), (i), (j), (m), and (n)] vs triangular type [(c), (d), (g), (h), (k), (l), (o), and (p)]. The tip-sample distance is for [(a)–(d)], for [(e)–(h)], for [(i)–(l)], and for [(m)–(p)].

Image of FIG. 10.
FIG. 10.

Simulation vs experimental results (rectangular cantilever). Approach was repeated 25 times. The mean and standard deviation (of the distance at which intensity is the maximum for the 25 experiments) are 194.0 and , respectively.

Image of FIG. 11.
FIG. 11.

Simulation vs experimental results (triangular cantilever). Approach was repeated 25 times. The mean and standard deviation (of the distance at which intensity is the maximum for the 25 experiments) are 224.8 and , respectively.

Tables

Generic image for table
Table I.

Coordinates of seven regions (unit: micrometer) .

Generic image for table
Table II.

Coordinates of windows for experiments (unit: micrometer) .

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/content/aip/journal/rsi/80/7/10.1063/1.3181787
2009-07-24
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Automatic approaching method for atomic force microscope using a Gaussian laser beam
http://aip.metastore.ingenta.com/content/aip/journal/rsi/80/7/10.1063/1.3181787
10.1063/1.3181787
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