Principle of chromatic confocal microscopy.
Schematic diagram of a beam scanning chromatic confocal microscope.
Plot of wavelength-to-depth codification at 0 scanning angle.
(a) Surface plot of experimentally determined wavelength for a flat mirror positioned at , and (b) its cross-sectional profile cut by .
Plot of scanning angle vs determined wavelength for the fixed flat plane at some specific positions. Results of numerical simulation by ray tracing with .
Difference in the lateral field of view when a microruler is positioned at (solid line) and (dotted line).
Plot of depth position vs width of lateral field of view. By experiments, the lateral field of view increases as the sample is moving toward the OL.
Normalized spectral response measured at for four positions of a flat mirror.
Plot of depth position vs (a) spectral FWHM, and (b) axial FWHM.
Normalized intensity FWHM for the single design wavelength. Normalized intensity at one pixel of line CCD is measured with physically translating the mirror in axial direction.
Three-dimensionally reconstructed surface image of the height standard sample.
Plot of cross-sectional profile cut by (a) plane and (b) plane.
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