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Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope
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View: Figures


Image of FIG. 1.
FIG. 1.

Principle of chromatic confocal microscopy.

Image of FIG. 2.
FIG. 2.

Schematic diagram of a beam scanning chromatic confocal microscope.

Image of FIG. 3.
FIG. 3.

Plot of wavelength-to-depth codification at 0 scanning angle.

Image of FIG. 4.
FIG. 4.

(a) Surface plot of experimentally determined wavelength for a flat mirror positioned at , and (b) its cross-sectional profile cut by .

Image of FIG. 5.
FIG. 5.

Plot of scanning angle vs determined wavelength for the fixed flat plane at some specific positions. Results of numerical simulation by ray tracing with .

Image of FIG. 6.
FIG. 6.

Difference in the lateral field of view when a microruler is positioned at (solid line) and (dotted line).

Image of FIG. 7.
FIG. 7.

Plot of depth position vs width of lateral field of view. By experiments, the lateral field of view increases as the sample is moving toward the OL.

Image of FIG. 8.
FIG. 8.

Normalized spectral response measured at for four positions of a flat mirror.

Image of FIG. 9.
FIG. 9.

Plot of depth position vs (a) spectral FWHM, and (b) axial FWHM.

Image of FIG. 10.
FIG. 10.

Normalized intensity FWHM for the single design wavelength. Normalized intensity at one pixel of line CCD is measured with physically translating the mirror in axial direction.

Image of FIG. 11.
FIG. 11.

Three-dimensionally reconstructed surface image of the height standard sample.

Image of FIG. 12.
FIG. 12.

Plot of cross-sectional profile cut by (a) plane and (b) plane.


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Scitation: Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope