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Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method
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Image of FIG. 1.
FIG. 1.

(a) Schematic layout of photonic microcantilever with asymmetric multimode receiver waveguide (after Ref. 25). Simulation results for (b) output power and (c) differential signal as a function of microcantilever deflection. Simulations are performed with FIMMWAVE/PROP by Photon Design.

Image of FIG. 2.
FIG. 2.

Schematic layout of waveguide splitter network and microcantilever array. The solid lines represent waveguides that are optically sourced and correspond to active microcantilevers in the array; the dashed lines represent waveguides that are not used and correspond to inactive microcantilevers in the array. The numbers on the far right indicate the numbering convention for the active microcantilevers.

Image of FIG. 3.
FIG. 3.

(a) Microscope image of part of waveguide splitter network. (b) SEM image of two splitters on the main input waveguide and one of the TBBs. Other etched patterns are artifacts of the EBL alignment process and do not affect waveguide operation. (c) SEM image of 90° TBBs on a output waveguide. (d) SEM image of section of the microcantilever array after release. (e) Close-up SEM image of microcantilever tip and strip loading on receiving waveguide. This particular sample has a much wider gap at the end of the microcantilever, which is not representative of the array reported in this paper.

Image of FIG. 4.
FIG. 4.

Schematic of the experimental setup showing network array, the bent up cantilevers, the glass piece for pushing down on the cantilevers, and the imaging camera for simultaneous readout.

Image of FIG. 5.
FIG. 5.

Measured (a) and (b) signals in units of electron counts (proportional to the total flux incident on the camera pixels) of each microcantilever as a function of piezoactuator position. (c) Relative position of and Gaussian fit peaks for each microcantilever. (d) Differential and (e) scaled differential signals from the and data. (f) Slope of each scaled differential signal plotted against the difference in the corresponding and peak positions.


Generic image for table
Table I.

Difference in and peak positions , peak ratio, and average slope of scaled differential signal for each microcantilever.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method