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Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy
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View: Figures


Image of FIG. 1.
FIG. 1.

Prototype bread-board system of a PSIM instrument for the simultaneous monitoring of the displacements of multiple microcantilever arrays.

Image of FIG. 2.
FIG. 2.

Schematic setup of a modified Twyman–Green interferometer used for PSIM.

Image of FIG. 3.
FIG. 3.

Areas selected for analysis of an interferogram superimposed on a two-cantilever array, showing the chip substrate at the top.

Image of FIG. 4.
FIG. 4.

Representative data of a height-profile map for a array of microcantilevers obtained using PSIM.

Image of FIG. 5.
FIG. 5.

Schematic illustration of the sample-cell design: (a) Measurement-cell base with four microcantilever-array chips located in pockets; (b) addition of a seal with cut-out slots defining the sample-flow channels. Inlet/outlet holes for the sample flow lie in each track of the sample base at the end of the sample-flow cut in the seal, and a central outlet/inlet hole is at the center of the cell.

Image of FIG. 6.
FIG. 6.

Photograph of a cross-shaped flow-channel configuration with a central sample inlet/outlet port for four microcantilever-array chips, each with two cantilever sensors.

Image of FIG. 7.
FIG. 7.

Photograph of a prototype measurement cell with cross-shaped sample-flow channels, accommodating four microcantilever-array chips in this case.

Image of FIG. 8.
FIG. 8.

Short-term baseline noise for two cantilevers on the same chip measured using the PSIM proof-of-concept system.

Image of FIG. 9.
FIG. 9.

Simultaneously measured displacements of four microcantilevers from two separate sensor-chips (MC2–39, MC2–40), all coated on one side with SH-(CH2)18-COOH, exposed for 100 s to toluene vapor.

Image of FIG. 10.
FIG. 10.

Detection of DMMP vapor by the simultaneous monitoring of four different microcantilever-array chips with three differently functionalized receptor layers.

Image of FIG. 11.
FIG. 11.

Individual sensor chip addressing. Switch from a flow of pure water along all four channels (a) to a flow of pure water along three channels and dyed water along one channel (b).

Image of FIG. 12.
FIG. 12.

Schematic illustration of a conceptual sensor array consisting of 20 commercially available sensor-array chips (NanoWorld, Arrow TL8), holding a total of 160 microcantilevers. The dimensions of the area required for imaging, to allow parallel PSIM readout, is .


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy