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Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator
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Image of FIG. 1.
FIG. 1.

The vertical positioner is a 10 mm piezoelectric stack actuator (Noliac SCMAP07) bonded to a standard base plate. The sample holder is affixed to the top of the stack.

Image of FIG. 2.
FIG. 2.

Schematic diagram of the vertical feedback loop operating in constant- force contact-mode AFM. The image profile is the voltage applied to the amplifier.

Image of FIG. 3.
FIG. 3.

A comparison of hysteresis exhibited by the voltage-driven and charge-driven piezoelectric positioner shown in Fig. 1. The input signal was a 100 Hz sine wave with a peak-to-peak voltage of 150 V in (a) and 30 V in (b). (The charge-driven results are offset for clarity).

Image of FIG. 4.
FIG. 4.

Simplified schematic diagram of a charge drive. The piezoelectric load is shaded in gray.

Image of FIG. 5.
FIG. 5.

The topography of a BudgetSensors HS-100MG calibration grating imaged in constant-force contact-mode. The scan area is and the feature height is 100 nm. The dashed line indicates the location of the single profile line plotted in Fig. 6.

Image of FIG. 6.
FIG. 6.

The profile of a single image line acquired using a (a) voltage-driven and (b) charge-driven vertical positioner.


Generic image for table
Table I.

The maximum error due to hysteresis of the voltage-driven and charge-driven piezoelectric actuator.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator