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Boron ion source based on planar magnetron discharge in self-sputtering modea)
a)Contributed paper, published as part of the Proceedings of the 13th International Conference on Ion Sources, Gatlinburg, Tennessee, September 2009.
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10.1063/1.3258029
/content/aip/journal/rsi/81/2/10.1063/1.3258029
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/2/10.1063/1.3258029
/content/aip/journal/rsi/81/2/10.1063/1.3258029
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/content/aip/journal/rsi/81/2/10.1063/1.3258029
2010-02-05
2014-07-11
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Boron ion source based on planar magnetron discharge in self-sputtering modea)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/2/10.1063/1.3258029
10.1063/1.3258029
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