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Characteristics of liquid cluster ion beam for surface treatmenta)
a)Contributed paper, published as part of the Proceedings of the 13th International Conference on Ion Sources, Gatlinburg, Tennessee, September 2009.
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10.1063/1.3264627
/content/aip/journal/rsi/81/2/10.1063/1.3264627
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/2/10.1063/1.3264627

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of liquid cluster ion source and electrostatic lens.

Image of FIG. 2.
FIG. 2.

Equipotential line and trajectories of ethanol cluster ion beams whose cluster size is 1000 with (a) retarding electrode without rim and , (b) retarding electrode with 15 mm long rim and , and (c) retarding electrode with 15 mm long rim and .

Image of FIG. 3.
FIG. 3.

Dependence of beam intensity on Einzel lens voltage measured using Faraday cup with 10 mm diameter collimator.

Image of FIG. 4.
FIG. 4.

Dependences of cluster size distribution on (a) acceleration voltage and (b) current of electrons for ionization.

Tables

Generic image for table
Table I.

Statistical values of cluster size distributions.

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/content/aip/journal/rsi/81/2/10.1063/1.3264627
2010-02-04
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characteristics of liquid cluster ion beam for surface treatmenta)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/2/10.1063/1.3264627
10.1063/1.3264627
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