Schematic view of plasma chamber: x shows the distance between the center of center coil (Ref. 2) and upper stream end of electrode. “z” shows the distance between the center of center coil and lower stream end of bias disk. The extraction electrode installed just downstream of plasma electrode is also movable.
Plasma electrodes: (a)(i) shape of plasma chamber side is flat, (b)(i) tapered with 66 degrees. Bias disk at the upper stream end of plasma chamber: (a)(ii) size of in diameter, (b)(ii) .
Typical spectrum of which were optimized to maximize the ion current with charge of .
Bias disk position dependence of current. (a) Result for the case of set A; (b) for set B. Typical mirror field in this region is also shown in upper figure (a).
Intensities of and for each case of A and B with several electrode position conditions. The “electrode position” is the distance between the center of center coil and upper stream end of electrode as shown in Fig. 1 by x. The other parameters such as mirror field strength, bias disk position, its biased voltage, and gas flow were optimized to maximize the current for each ion and each position of plasma electrode.
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