Schematic diagram of a cantilever with a piezoelectric actuator. (a) Cantilever beam with a different MOI. (b) Cantilever beam compounded by the different bending of MOI. (c) Cantilever coordinate system and detection scheme by the Wheatstone bridge.
(a) Schematic image of a self-sensing and self-actuating PZT cantilever with an integrated Wheatstone bridge circuit. The size of a piezoresistor is . (b) SEM image of a reference cantilever and an actuating cantilever with PZT film. (Inset) The tip is perfectly protected during etching process. (c) SEM image of an integrated Wheatstone bridge circuit. A bias of applied through a Wheatstone bridge circuit imbedded into cantilever and the sensing signals (S1 and S2) were amplified 1000 times with a low-noise differential preamplifier.
Electrical properties of the PZT capacitor after fabrication of the cantilever. (a) Linear characteristic curve. (b) field curve. (c) Resonace frequency curve (d) field curve.
Circuit diagram for piezoresistive measurements. (a) The self-sensing piezoresisitve cantilever connected to a Wheatstone bridge circuit. (b) The self-sensing piezoresistive cantilever with a Wheatstone bridge circuit embedded.
Noise level measurements. Output signals of various cantilevers amplified 1000 times with a low-noise differential preamplifier. (a) Noise level analysis of various cantilevers for 1 h. (b) Noise spectra of various cantilevers for 1 h.
(a) FD curve of a commercially available self-sensing cantilever. (b) FD curve of the PZT self-sensing cantilever.
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