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Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit
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10.1063/1.3327822
/content/aip/journal/rsi/81/3/10.1063/1.3327822
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/3/10.1063/1.3327822
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of a cantilever with a piezoelectric actuator. (a) Cantilever beam with a different MOI. (b) Cantilever beam compounded by the different bending of MOI. (c) Cantilever coordinate system and detection scheme by the Wheatstone bridge.

Image of FIG. 2.
FIG. 2.

(a) Schematic image of a self-sensing and self-actuating PZT cantilever with an integrated Wheatstone bridge circuit. The size of a piezoresistor is . (b) SEM image of a reference cantilever and an actuating cantilever with PZT film. (Inset) The tip is perfectly protected during etching process. (c) SEM image of an integrated Wheatstone bridge circuit. A bias of applied through a Wheatstone bridge circuit imbedded into cantilever and the sensing signals (S1 and S2) were amplified 1000 times with a low-noise differential preamplifier.

Image of FIG. 3.
FIG. 3.

Electrical properties of the PZT capacitor after fabrication of the cantilever. (a) Linear characteristic curve. (b) field curve. (c) Resonace frequency curve (d) field curve.

Image of FIG. 4.
FIG. 4.

Circuit diagram for piezoresistive measurements. (a) The self-sensing piezoresisitve cantilever connected to a Wheatstone bridge circuit. (b) The self-sensing piezoresistive cantilever with a Wheatstone bridge circuit embedded.

Image of FIG. 5.
FIG. 5.

Noise level measurements. Output signals of various cantilevers amplified 1000 times with a low-noise differential preamplifier. (a) Noise level analysis of various cantilevers for 1 h. (b) Noise spectra of various cantilevers for 1 h.

Image of FIG. 6.
FIG. 6.

(a) FD curve of a commercially available self-sensing cantilever. (b) FD curve of the PZT self-sensing cantilever.

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/content/aip/journal/rsi/81/3/10.1063/1.3327822
2010-03-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/3/10.1063/1.3327822
10.1063/1.3327822
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