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Pulse stretcher with variable pulse length for excimer laser applications
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Scheme of pulse stretcher configuration. (b) Sketch of the setup in a 3D presentation.

Image of FIG. 2.
FIG. 2.

(a) Beam propagation through the stretcher without matching the wave-front radius [positions (1), (2),… see Fig. 1(a)]. The simulation was performed with a full angle divergence of 5 mrad. The beam diameters at mirrors 1 and 4 are larger than in (b). (b) Beam propagation through the stretcher with cylindrical lens in front of the beam splitter for matching the wave-front radius.

Image of FIG. 3.
FIG. 3.

Simulation of stretched pulses for mirrors with 98% reflectivity and different beam splitter reflectivities (a) behind the first stretcher loop and (b) using both stretcher loops.

Image of FIG. 4.
FIG. 4.

Measured original pulse as well as stretched pulses using the first, the second, and both stretcher loops, respectively.

Image of FIG. 5.
FIG. 5.

Measured beam profiles for the original and for stretched laser pulses.

Image of FIG. 6.
FIG. 6.

Nearly linear dependence of on reciprocal 193 nm pulse length.

Image of FIG. 7.
FIG. 7.

Spectra integral increases with increasing reciprocal pulse length.


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Scitation: Pulse stretcher with variable pulse length for excimer laser applications