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New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges
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10.1063/1.3427220
/content/aip/journal/rsi/81/5/10.1063/1.3427220
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/5/10.1063/1.3427220
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of calculation process.

Image of FIG. 2.
FIG. 2.

Process flow chart (modified Shepard).

Image of FIG. 3.
FIG. 3.

Process flow chart (plasma diffusion).

Image of FIG. 4.
FIG. 4.

A schematic of the experimental setup.

Image of FIG. 5.
FIG. 5.

X-Y array and probe number on a measurement substrate.

Image of FIG. 6.
FIG. 6.

The spatial plasma density profile at 300 W and at 6 mTorr argon pressure.

Image of FIG. 7.
FIG. 7.

The estimate error rates at 300 W and at 6 mTorr argon pressure.

Image of FIG. 8.
FIG. 8.

The spatial plasma density profile at 300 W and at 60 mTorr argon pressure.

Image of FIG. 9.
FIG. 9.

The estimate error rates at 300 W and at 60 mTorr argon pressure.

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/content/aip/journal/rsi/81/5/10.1063/1.3427220
2010-05-17
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New interpolation algorithm for evaluation a spatial profile of plasma densities in radio frequency discharges
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/5/10.1063/1.3427220
10.1063/1.3427220
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