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Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy
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10.1063/1.3469796
/content/aip/journal/rsi/81/8/10.1063/1.3469796
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/8/10.1063/1.3469796
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Working principle of the switchable probe; the SFM and TOF modes are switched through electrostatic actuation.

Image of FIG. 2.
FIG. 2.

Model of the switchable cantilever probe featuring curved electrodes.

Image of FIG. 3.
FIG. 3.

Fabrication of the probe.

Image of FIG. 4.
FIG. 4.

SEM images of (a) the cantilever and extraction electrode before cutting with FIB, (b) one edge of the cantilever after cutting with the FIB, (c) both side edges of cantilever end after cutting with the FIB, and (d) the tip of cantilever after a subtractive process using the FIB.

Image of FIG. 5.
FIG. 5.

(a) Top-view SEM image of the fabricated probe. (b) Magnified SEM images of a stopper.

Image of FIG. 6.
FIG. 6.

SEM images of (a) the electrostatic actuator with a probe positioned vertically, (b) the aperture of the extraction electrode formed parallel to the substrate, and (c) the tip after cutting with the FIB.

Image of FIG. 7.
FIG. 7.

Actuation characteristics of the end of the cantilever.

Image of FIG. 8.
FIG. 8.

Optical images of the maximum displacements in the (a) SFM (; maximum ) and (b) TOF (; maximum ) modes.

Image of FIG. 9.
FIG. 9.

Schematic representation of the experimental setup used to determine the frequency characteristics of the probe.

Image of FIG. 10.
FIG. 10.

(a) Measured frequencies and (b) displacements of the cantilever under forward and backward applied voltages.

Image of FIG. 11.
FIG. 11.

SFM image of the -pitch Au grid recorded using the electrostatic probe.

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/content/aip/journal/rsi/81/8/10.1063/1.3469796
2010-08-11
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/rsi/81/8/10.1063/1.3469796
10.1063/1.3469796
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