Working principle of the switchable probe; the SFM and TOF modes are switched through electrostatic actuation.
Model of the switchable cantilever probe featuring curved electrodes.
Fabrication of the probe.
SEM images of (a) the cantilever and extraction electrode before cutting with FIB, (b) one edge of the cantilever after cutting with the FIB, (c) both side edges of cantilever end after cutting with the FIB, and (d) the tip of cantilever after a subtractive process using the FIB.
(a) Top-view SEM image of the fabricated probe. (b) Magnified SEM images of a stopper.
SEM images of (a) the electrostatic actuator with a probe positioned vertically, (b) the aperture of the extraction electrode formed parallel to the substrate, and (c) the tip after cutting with the FIB.
Actuation characteristics of the end of the cantilever.
Optical images of the maximum displacements in the (a) SFM (; maximum ) and (b) TOF (; maximum ) modes.
Schematic representation of the experimental setup used to determine the frequency characteristics of the probe.
(a) Measured frequencies and (b) displacements of the cantilever under forward and backward applied voltages.
SFM image of the -pitch Au grid recorded using the electrostatic probe.
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