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Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube
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10.1063/1.3544022
/content/aip/journal/rsi/82/2/10.1063/1.3544022
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/2/10.1063/1.3544022
/content/aip/journal/rsi/82/2/10.1063/1.3544022
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/content/aip/journal/rsi/82/2/10.1063/1.3544022
2011-02-16
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/2/10.1063/1.3544022
10.1063/1.3544022
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