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Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube
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10.1063/1.3544022
/content/aip/journal/rsi/82/2/10.1063/1.3544022
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/2/10.1063/1.3544022
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic diagram of the experimental setup (left) and photo (right) showing the actual discharge picture in EGD-PIII with an insulating tube and (b) traditional EGD-PIII and the corresponding discharge photo.

Image of FIG. 2.
FIG. 2.

Hydrogen pressure gradient distribution between the implantation chamber and insulating tube.

Image of FIG. 3.
FIG. 3.

(a) Potential configurations in the experimental region and (b) enlarged view of the potential contours in the insulating tube.

Image of FIG. 4.
FIG. 4.

Hydrogen average target currents distribution with and without the insulating tube with increasing gas flow rate under different experimental voltages: (a) 12 kV, 100 Hz, and 50 μs; (b) 12 kV, 100 Hz, and 100 μs; and (c) 14 kV, 100 Hz, and 100 μs.

Image of FIG. 5.
FIG. 5.

Hydrogen current waveforms with or without the insulating tube under different experimental conditions: (a) 12 kV, 100 Hz, and 50 μs, (b) 12 kV, 100 Hz, and 100 μs, and (c) 14 kV, 100 Hz, and 100 μs. The hydrogen flow rate is 100 sccm.

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/content/aip/journal/rsi/82/2/10.1063/1.3544022
2011-02-16
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved hydrogen ionization rate in enhanced glow discharge plasma immersion ion implantation by enlarging the interaction path using an insulating tube
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/2/10.1063/1.3544022
10.1063/1.3544022
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