(a) Schematic diagram of the experimental setup (left) and photo (right) showing the actual discharge picture in EGD-PIII with an insulating tube and (b) traditional EGD-PIII and the corresponding discharge photo.
Hydrogen pressure gradient distribution between the implantation chamber and insulating tube.
(a) Potential configurations in the experimental region and (b) enlarged view of the potential contours in the insulating tube.
Hydrogen average target currents distribution with and without the insulating tube with increasing gas flow rate under different experimental voltages: (a) 12 kV, 100 Hz, and 50 μs; (b) 12 kV, 100 Hz, and 100 μs; and (c) 14 kV, 100 Hz, and 100 μs.
Hydrogen current waveforms with or without the insulating tube under different experimental conditions: (a) 12 kV, 100 Hz, and 50 μs, (b) 12 kV, 100 Hz, and 100 μs, and (c) 14 kV, 100 Hz, and 100 μs. The hydrogen flow rate is 100 sccm.
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