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High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy
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10.1063/1.3600594
/content/aip/journal/rsi/82/6/10.1063/1.3600594
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/6/10.1063/1.3600594
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Figures

Image of FIG. 1.
FIG. 1.

Fabrication process flow of cantilever array silicon-on-insulator (SOI) wafers. LPCVD: low pressure chemical vapor deposition; RIE: reactive-ion-etching; DRIE: deep reactive-ion-etching; HF: hydrofluoric acid etching.

Image of FIG. 2.
FIG. 2.

(a) Photo of a 4-inch cantilever array SOI wafer after deposition of a Fe-Pd-W thin film materials library through a micro-machined Si shadow mask. The deposited areas appear in gray. (b) A scanning electron microscopy image of un-coated cantilevers.

Image of FIG. 3.
FIG. 3.

Scheme of the experimental setup of the DHM.

Image of FIG. 4.
FIG. 4.

Reconstructed images of a coated cantilever: (a) intensity, (b) phase of the selected area, and (c) 3D surface profile converted from the phase image. Note that the curvature is exaggerated by scaling of axes.

Image of FIG. 5.
FIG. 5.

3D surface profile of a coated cantilever obtained by DHM. The 10 nm out-of-plane resolution allows simultaneous and precise evaluation of the deposited film thickness and the radius of curvature of the cantilever.

Image of FIG. 6.
FIG. 6.

The distribution of (a) film thickness, (b) change of curvature, and (c) calculated film stress corresponding to the location of each measured cantilever.

Image of FIG. 7.
FIG. 7.

(a) Color-coded visualization of thin film stresses in a ternary composition diagram. (b) Quantitative composition-dependent film stress plot across an exemplary composition range indicated by the dotted line in (a).

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/content/aip/journal/rsi/82/6/10.1063/1.3600594
2011-06-22
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/6/10.1063/1.3600594
10.1063/1.3600594
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