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Development of x-ray laminography under an x-ray microscopic condition
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10.1063/1.3609865
/content/aip/journal/rsi/82/7/10.1063/1.3609865
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/7/10.1063/1.3609865

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of an optical setup for x-ray imaging laminography constructed at undulator beamline BL20XU in SPring-8.

Image of FIG. 2.
FIG. 2.

Relation between the depth of focus and the tolerated field of view of the system.

Image of FIG. 3.
FIG. 3.

(a) Photograph of three kinds of prototype sample holders. (b) Projection (upper) and reconstructed (lower) images of a copper grid sheet obtained by using three kinds of sample holders. The gray scales of projection images are represented as normalized intensity. Measurement condition: A set of 900 projection images were acquired with an exposure time of 0.3 s/image.

Image of FIG. 4.
FIG. 4.

(a) Sectional images of Cu#1000 (left) and Cu#1500 (right) grid sheets obtained by x-ray imaging laminography. (b) Three-dimensional views of layered copper grid sheets. Diagonal view (upper) and side view (lower). Dashed lines in the side view correspond to sectional planes shown in (a).

Image of FIG. 5.
FIG. 5.

(a) Projection image of diatomite powder placed on the SiN membrane. (b) Sectional images parallel (upper) and perpendicular (lower) to the membrane. The perpendicular section corresponds to a sectional plane at a dashed line in the parallel section. (c) Digitally enlarged image of the largest diatom shell. (d) Line profile measured between the arrows shown in (c). (e) Three-dimensional rendered view of diatomite powder on the membrane (stereo view). Volume size: 132 μm × 132 μm × 46 μm.

Image of FIG. 6.
FIG. 6.

(a) Sectional images of dried HeLa cells on the SiN membrane. (Upper) parallel and (lower) perpendicular section to the membrane. The perpendicular section corresponds to a sectional plane at a dashed line in the parallel section. (b) Three-dimensional rendered view. Volume size: 132 μm × 132 μm × 14 μm. Measurement condition: A set of 1800 projection images was acquired with exposure time of 1 s/image. The angle of inclination φ was 40 degrees.

Tables

Generic image for table
Table I.

Specifications of three kinds of tubes used as an interface between a planar sample and a rotational stage.

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/content/aip/journal/rsi/82/7/10.1063/1.3609865
2011-07-19
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of x-ray laminography under an x-ray microscopic condition
http://aip.metastore.ingenta.com/content/aip/journal/rsi/82/7/10.1063/1.3609865
10.1063/1.3609865
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