Fabrication process of MZP.
Measured roundness of a wire core. Round average diameter is 50.2006 μm and 50.1834 μm at positions A and B, respectively.
Micrographs of the fabricated MZP obtained using a scanning electron microscope: (a) whole structure and (b) enlarged image of the multilayer region (region indicated by the white rectangle in (a)).
Optical system for evaluating focusing properties of the MZP constructed at the Hyogo ID-BL (BL24XU) (Ref. 15) of SPring-8.
Measured LSF (solid line with dots), tomographically reconstructed PSF (solid line), and PSF calculated using Fresnel-Kirchhoff diffraction LFS (dashed line).
Diagram showing calculation of PSF from LSF based on tomographic reconstruction.
Scanning transmission images of a Siemens star pattern. Arrows indicate the scanning sequence.
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