(a) Schematic of the new STM system. The new system is mainly consist of a long range PZT actuator as the Z-direction servo scanner, X-Y direction motorized stage for long range scanning, tilt stage for carrying out sample-tilt-scanning; (b) apparatus photo of the new STM system.
Scanning electron microscopy (SEM) image of the self-developed high aspect ratio STM probe. The insert is the details of the probe tip apex.
Schematic of the measured difference by using (a) normal STM probe and (b) self-developed high aspect ratio probe.
Schematic of the four interrelated steps for sample-tilt-scanning methodology with high aspect ratio probe.
The relationship of the sample-tilt-scanning images and the real topography for complete elimination of the scanning blind region.
SEM image of the high step microstructure.
Three-dimensional measured images of the high step microstructure by using the new STM system and sample-tilt-scanning methodology. (a) By traditional method, the slope angle of the sidewall is measured to be 67°, (b) by sample-tilt-scanning, the slope angle of the sidewall is measured to be 85°, and the step height of 22.96 μm.
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