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Rapid measurement of a high step microstructure with 90° steep sidewall
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10.1063/1.3676651
/content/aip/journal/rsi/83/1/10.1063/1.3676651
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/1/10.1063/1.3676651
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of the new STM system. The new system is mainly consist of a long range PZT actuator as the Z-direction servo scanner, X-Y direction motorized stage for long range scanning, tilt stage for carrying out sample-tilt-scanning; (b) apparatus photo of the new STM system.

Image of FIG. 2.
FIG. 2.

Scanning electron microscopy (SEM) image of the self-developed high aspect ratio STM probe. The insert is the details of the probe tip apex.

Image of FIG. 3.
FIG. 3.

Schematic of the measured difference by using (a) normal STM probe and (b) self-developed high aspect ratio probe.

Image of FIG. 4.
FIG. 4.

Schematic of the four interrelated steps for sample-tilt-scanning methodology with high aspect ratio probe.

Image of FIG. 5.
FIG. 5.

The relationship of the sample-tilt-scanning images and the real topography for complete elimination of the scanning blind region.

Image of FIG. 6.
FIG. 6.

SEM image of the high step microstructure.

Image of FIG. 7.
FIG. 7.

Three-dimensional measured images of the high step microstructure by using the new STM system and sample-tilt-scanning methodology. (a) By traditional method, the slope angle of the sidewall is measured to be 67°, (b) by sample-tilt-scanning, the slope angle of the sidewall is measured to be 85°, and the step height of 22.96 μm.

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/content/aip/journal/rsi/83/1/10.1063/1.3676651
2012-01-19
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rapid measurement of a high step microstructure with 90° steep sidewall
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/1/10.1063/1.3676651
10.1063/1.3676651
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