Schematic configurations of the wave-dispersion and focusing concepts of cylindrical and conical analyzers and the present crystal analyzer for one-shot x-ray spectrometry. (a) Von Hamos configuration using a cylindrical crystal analyzer. (b) Hall's configuration using a conically bent crystal analyzer. (c) Configuration of the present integrated conical analyzer, which consists of a set of conical rings, A, B, and C, of right cones with different opening angles and base radii with their surfaces located on a nodal line passing through the analyzer. Therefore, the tilt angle of the base plane of the rings gradually increases toward the detector. These features make it possible to focus x-rays of different wavelengths on the detector plane perpendicular to the nodal line. (d) Two-dimensional x-ray diagram of the configuration of the present analyzer.
Plastically deformed single-crystal Ge (110) wafer used in the present study. (a) The planar Ge wafer was set between upper convex and lower concave carbon dies, then pressed at a high temperature. (b) Plastically deformed single-crystal Ge wafer.
Schematic geometry of the system for simultaneously acquiring x-ray spectra using the integrated conical analyzer.
Obtained x-ray fluorescence (XRF) spectra image and profile. (a) Obtained XRF spectral image of focal spots, where the horizontal and vertical axes are the spectral and spatial axes, respectively. (b) Integrated spectral profile evaluated from XRF image.
Obtained spectral peak profiles of Ni Kα, Cu Kα, and Ga Kα lines. Open circles, red solid lines, and blue dot-dashed lines indicate measured intensities and Gaussian fittings of the Kα1 and Kα2 lines, respectively.
Obtained horizontal peak profiles of Ni Kα1, Cu Kα1, and Ga Kα1 lines. Open circles and red solid lines indicate measured intensities and their Gaussian fittings, respectively.
Geometries for the broadening of focal spots caused by angular deviations of crystal orientation. (a) Schematic geometries for the broadening of focal spots. (b) Effect of δθ x on energy resolution. (c) Effect of δθϕ on convergence.
Calculated size of broadened horizontal spot, s Y , as a function of angular deviation of mosaic .
Structural parameters defining the shape of the integrated conical analyzer. The Bragg angle, θt, the base radius, R t, and the tilt angle of the base plane, δt, were calculated in accordance with Eqs. (1)–(4) using the value for the near edge.
Horizontal and vertical spot sizes, s Y and s Z, spectral energy resolution, ΔE spect., and angular deviation of mosaic, of each fluorescent x-ray line evaluated from spectra obtained using the present system.
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