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A scanning tunneling microscope with a scanning range from hundreds of micrometers down to nanometer resolution
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10.1063/1.4744931
/content/aip/journal/rsi/83/10/10.1063/1.4744931
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/10/10.1063/1.4744931
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

UHV chamber: (a) side and (b) top view.

Image of FIG. 2.
FIG. 2.

Image of (a) preparation chamber and (b) coolable manipulator.

Image of FIG. 3.
FIG. 3.

Image of STM chamber.

Image of FIG. 4.
FIG. 4.

Sample holder modified by thermo-rods.

Image of FIG. 5.
FIG. 5.

Heating stage with sample (a) 3D view (b) side view.

Image of FIG. 6.
FIG. 6.

Front view of multi-scale STM.

Image of FIG. 7.
FIG. 7.

Front view of the two stages of the multi-scale STM: flexure scanning stage and beetle type stage.

Image of FIG. 8.
FIG. 8.

Front view of beetle type STM.

Image of FIG. 9.
FIG. 9.

Details of inner piezo that holds the tip.

Image of FIG. 10.
FIG. 10.

Front view of flexure scanning stage based STM.

Image of FIG. 11.
FIG. 11.

Eddy current damping.

Image of FIG. 12.
FIG. 12.

Typical ECU architecture; PC: Personal computer, STM: Scanning tunneling microscope, ECU: Electronic control unit, PCI: Peripheral component interconnect bus, LAN: Local area network, PWR: Power supply, RT: Real-time controller, FPGA: Field-programmable gate array, HV-Amp: High-voltage amplifier, I/O: Input/output interface, DAC: Digital-to-analog converter, ADC: Analog-to-digital converter, CTRL: Control voltages for HV-amplifiers, VT: Bias voltage, R1..R2: Additional HV output channels, IN1…IN4: Signal input channels.

Image of FIG. 13.
FIG. 13.

Software architecture; PC: Personal computer, STM: Scanning tunneling microscope, FPGA: Field-programmable gate array, CMD: Command task, DAQ: Data acquisition and communication task, UI: User interface, FIFO: First-in first-out buffer, PCI: Peripheral component interconnect bus, TCP/IP: Transmission control protocol/Internet protocol, SEND: Send task, RECV: Receive task, DAC: Digital-to-analog converter, ADC: Analog-to-digital converter.

Image of FIG. 14.
FIG. 14.

Operating principle of the multi-scale STM (tunnel current amplifier not shown); LAN: Local area network, ECU: Electronic control unit, HV: High voltage, ITA: Tunnel current signal routed to ECU-A, ITB: Tunnel current signal routed to ECU-B, VZA: z-drive signal from ECU-A, VZB: z-drive signal from ECU-B, VTA: Bias voltage generated by ECU-A; signals contributing to the feedback process are shown as thick lines, others as thin lines.

Image of FIG. 15.
FIG. 15.

Z-signals during scanning with flexure stage STM (a), (d) image based on z-signal of flexure stage (b), (e) image based on z-signal of beetle stage (c), (f) sum of (a), (d) and (b), (e).

Image of FIG. 16.
FIG. 16.

Overview images of GaN based sample: (a) light microscope image. Circle marks a defect on the sample (b) multi-scale STM image recorded with flexure scanning stage showing large roughness on the surface; I = 0.15 nA, V = −3.8 V (c) flexure scanning stage based image resolving the micropillars; I = 0.15 nA, V = −3.8 V, image is smoothed by a 2 pixel Gaussian smooth (d) SEM image recorded ex situ.

Image of FIG. 17.
FIG. 17.

Magnification series of star-shaped GaN based micropillars: (a) SEM image (b)–(g) STM images: (b)–(d) imaged by the flexure scanning stage based STM; I = 0.153 nA, V = −3.615 V. (e)–(g) imaged by beetle-type STM; I = 0.2 nA, V = −3.8 V.

Image of FIG. 18.
FIG. 18.

Au(111) imaged by beetle-type STM stage: (a), (b) Step array for height calibration; I = 60 pA, V = 538 mV: (a) STM image (b) line scan across five steps (c)–(f) Reconstruction lines (d) line scan across domain walls along the line in (c) (f) line scan along a domain wall of the unfiltered image along the line in (e); I = 0.36 nA, V = 83 mV (a) and (c) are unfiltered images, (c) is filtered by a 2×2 pixel Gaussian.

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/content/aip/journal/rsi/83/10/10.1063/1.4744931
2012-10-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A scanning tunneling microscope with a scanning range from hundreds of micrometers down to nanometer resolution
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/10/10.1063/1.4744931
10.1063/1.4744931
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