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Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion sourcea)
a)Contributed paper, published as part of the Proceedings of the 14th International Conference on Ion Sources, Giardini Naxos, Italy, September 2011.
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10.1063/1.3665966
/content/aip/journal/rsi/83/2/10.1063/1.3665966
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3665966

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic diagram of the PSTNIS device, (b) schematic diagram of the electrostatic energy analyzer.

Image of FIG. 2.
FIG. 2.

(a) Traditional Faraday cup, (b) semi-cylindrical Faraday cup with repeller guard ring.

Image of FIG. 3.
FIG. 3.

(a) ESA plot using the traditional ESA at 10, 20, and 30 sccm flow rate, (b) ESA plot using the modified ESA at –150 V target potential and 10 sccm flow rate.

Image of FIG. 4.
FIG. 4.

(a) Transverse ion current measurements using the modified ESA, (b) charge density distribution for negative Zr ions at –450 V target potential and 10 sccm flow rate.

Tables

Generic image for table
Table I.

Energy spreads at different target potentials.

Generic image for table
Table II.

Beam widths at different target potentials.

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/content/aip/journal/rsi/83/2/10.1063/1.3665966
2012-02-08
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrostatic energy analyzer measurements of low energy zirconium beam parameters in a plasma sputter-type negative ion sourcea)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3665966
10.1063/1.3665966
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