1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Brightness enhancement of plasma ion source by utilizing anode spot for nano applicationsa)
a)Contributed paper, published as part of the Proceedings of the 14th International Conference on Ion Sources, Giardini Naxos, Italy, September 2011.
Rent:
Rent this article for
USD
10.1063/1.3672472
/content/aip/journal/rsi/83/2/10.1063/1.3672472
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3672472

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of plasma ion source to utilize anode spot.

Image of FIG. 2.
FIG. 2.

Estimated brightness of the LMIS (triangle line) and plasma ion source utilizing the anode spot (square/circle line) and measured brightness of focused ion beam from the plasma ion source with/without the anode spot (squares/circle).

Image of FIG. 3.
FIG. 3.

Photograph of FIB adopting plasma ion source utilizing anode spot (left) and schematic diagram of the ion beam focusing system for the plasma ion source (right).

Image of FIG. 4.
FIG. 4.

Focused ion beam current as a function of bias current for anode spot at fixed beam diameter of 2 μm.

Tables

Generic image for table
Table I.

Comparison of the performance of the plasma ion source with anode spot to the multi-cusp rf plasma ion source.

Loading

Article metrics loading...

/content/aip/journal/rsi/83/2/10.1063/1.3672472
2012-02-16
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Brightness enhancement of plasma ion source by utilizing anode spot for nano applicationsa)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3672472
10.1063/1.3672472
SEARCH_EXPAND_ITEM