Schematic diagram of plasma ion source to utilize anode spot.
Estimated brightness of the LMIS (triangle line) and plasma ion source utilizing the anode spot (square/circle line) and measured brightness of focused ion beam from the plasma ion source with/without the anode spot (squares/circle).
Photograph of FIB adopting plasma ion source utilizing anode spot (left) and schematic diagram of the ion beam focusing system for the plasma ion source (right).
Focused ion beam current as a function of bias current for anode spot at fixed beam diameter of 2 μm.
Comparison of the performance of the plasma ion source with anode spot to the multi-cusp rf plasma ion source.
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