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Brightness enhancement of plasma ion source by utilizing anode spot for nano applicationsa)
a)Contributed paper, published as part of the Proceedings of the 14th International Conference on Ion Sources, Giardini Naxos, Italy, September 2011.
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10.1063/1.3672472
/content/aip/journal/rsi/83/2/10.1063/1.3672472
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3672472
/content/aip/journal/rsi/83/2/10.1063/1.3672472
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/content/aip/journal/rsi/83/2/10.1063/1.3672472
2012-02-16
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Brightness enhancement of plasma ion source by utilizing anode spot for nano applicationsa)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/2/10.1063/1.3672472
10.1063/1.3672472
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