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Realization of autofocusing system for laser direct writing on non-planar surfaces
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10.1063/1.4709407
/content/aip/journal/rsi/83/5/10.1063/1.4709407
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4709407
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Setup of the autofocusing system for LDW on non-planar surfaces.

Image of FIG. 2.
FIG. 2.

The waves for detecting the defocus z 0 when tilt angle α = 10°. (a) The wave for driving the pinhole. (b) The waves of normalized intensity response. The lengths of time Δt 1, Δt 2, and T/2 of curves C, B, and A correspond to defocuses 15 μm, −15 μm, and 0 μm, respectively, of the curved surface.

Image of FIG. 3.
FIG. 3.

The FES curve as a function of the defocus z 0.

Image of FIG. 4.
FIG. 4.

The FES generation module of SPC circuits.

Image of FIG. 5.
FIG. 5.

Block diagram of focus positioning control.

Image of FIG. 6.
FIG. 6.

The variation of PZT average control voltage towards the upper limit (b) when the curved substrate moves in the direction of arrow (a). Panel (b) shows that in the case of the voltage reaching the upper threshold, the stepper motor runs a certain distance to bring the voltage back to the median value of the lower and upper limits.

Image of FIG. 7.
FIG. 7.

The different synchronous configurations of the stepper motor and PZT when the average control voltage of PZT reaches the upper threshold. (a) The motor first moves downwards and the PZT then contracts upwards. (c) The PZT contracts upwards while the motor moves downwards, and the PZT then expands downwards. These two configurations cause spurs (b) and no spurs (d) in the focusing control when the objective lens tracks the curved substrate.

Image of FIG. 8.
FIG. 8.

(a) Photograph of the autofocusing system for LDW on non-planar surfaces. (b) The step response of the system in the case of a 3.7 μm defocus and the stepper motor not working. (c) The step response of the system in the case of a −7.7 μm defocus and the stepper motor working.

Image of FIG. 9.
FIG. 9.

Curves of autofocusing errors (in absolute values) as a function of substrate movement speed at different tilt angles of substrate. Curves C, B, and A are for tilt angles 3°, 5°, and 10°, respectively.

Image of FIG. 10.
FIG. 10.

Fabrication result on the curved substrate. (a) Lateral view photo. (b) Overhead view photo. (c) Partially enlarged view.

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/content/aip/journal/rsi/83/5/10.1063/1.4709407
2012-05-02
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Realization of autofocusing system for laser direct writing on non-planar surfaces
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4709407
10.1063/1.4709407
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