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Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy
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10.1063/1.4719661
/content/aip/journal/rsi/83/5/10.1063/1.4719661
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4719661

Figures

Image of FIG. 1.
FIG. 1.

Flow chart of non-Guassian surface generation. Here, Ssk and Sku are the designed skewness and kurtosis, respectively. Ssk and Sku are the modified skewness and kurtosis. ACF denotes the autocorrelation function.

Image of FIG. 2.
FIG. 2.

Typical results of the general rough surface simulation method.

Image of FIG. 3.
FIG. 3.

Schematic illustration of the genetic algorithm based optimal design method.

Image of FIG. 4.
FIG. 4.

Typical results of optimal design. (a) Tracked relative error during the iteration. (b) Variation tendency of the parameters during the iteration.

Image of FIG. 5.
FIG. 5.

One optimized surface. (a) Topography. (b) Corresponding grayscale bitmap.

Image of FIG. 6.
FIG. 6.

Results of the fabricated specimen. (a) Scanning electron microscope image under 45° tilt. (b) Atomic force microscope image. (c) Comparisons of the sectional profiles between the designed and measured surfaces along the arrows indicated in (b).

Tables

Generic image for table
Table I.

Parameters used in the optimal design of 3D rough surfaces.

Generic image for table
Table II.

Comparisons of surface parameters.

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/content/aip/journal/rsi/83/5/10.1063/1.4719661
2012-05-23
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optimal design and fabrication of three-dimensional calibration specimens for scanning probe microscopy
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4719661
10.1063/1.4719661
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