Schematic model of 3-DOF stage.
Schematic illustration of proposed stage.
Developed amplification mechanism.
Comparison of rotational displacement between circular hinge and cartwheel hinge.
Comparison of maximum stress between circular hinge and cartwheel hinge.
Comparison of “displacement/stress” between circular hinge and cartwheel hinge.
Developed 3-DOF compliant mechanism.
FEM simulation of mode shape.
Developed 3-DOF stage with case.
Experiment results of range test.
Experiment results of resolution test.
Experiment results of first three mode test.
Stiffness verification of the 3-DOF stage.
Verification of natural frequency.
Optimal design results.
Performance of stage with optimal design.
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