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Development of a novel 3-degrees of freedom flexure based positioning system
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10.1063/1.4720410
/content/aip/journal/rsi/83/5/10.1063/1.4720410
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4720410

Figures

Image of FIG. 1.
FIG. 1.

Schematic model of 3-DOF stage.

Image of FIG. 2.
FIG. 2.

Schematic illustration of proposed stage.

Image of FIG. 3.
FIG. 3.

Developed amplification mechanism.

Image of FIG. 4.
FIG. 4.

Hinge parameters.

Image of FIG. 5.
FIG. 5.

Comparison of rotational displacement between circular hinge and cartwheel hinge.

Image of FIG. 6.
FIG. 6.

Comparison of maximum stress between circular hinge and cartwheel hinge.

Image of FIG. 7.
FIG. 7.

Comparison of “displacement/stress” between circular hinge and cartwheel hinge.

Image of FIG. 8.
FIG. 8.

Developed 3-DOF compliant mechanism.

Image of FIG. 9.
FIG. 9.

FEM simulation of mode shape.

Image of FIG. 10.
FIG. 10.

Hardware components.

Image of FIG. 11.
FIG. 11.

Developed 3-DOF stage with case.

Image of FIG. 12.
FIG. 12.

Experiment results of range test.

Image of FIG. 13.
FIG. 13.

Experiment results of resolution test.

Image of FIG. 14.
FIG. 14.

Experiment results of first three mode test.

Tables

Generic image for table
Table I.

Lost motion.

Generic image for table
Table II.

Stiffness verification of the 3-DOF stage.

Generic image for table
Table III.

Verification of natural frequency.

Generic image for table
Table IV.

Optimal design results.

Generic image for table
Table V.

Performance of stage with optimal design.

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/content/aip/journal/rsi/83/5/10.1063/1.4720410
2012-05-29
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Development of a novel 3-degrees of freedom flexure based positioning system
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4720410
10.1063/1.4720410
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