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Note: Long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope
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10.1063/1.4721273
/content/aip/journal/rsi/83/5/10.1063/1.4721273
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4721273
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic view of the new STM system for long range and high depth surface topography measurement and (b) scanning electron microscope (SEM) images of the self-developed STM probe with a high aspect ratio of 8:1, a effective length of approximately 400 μm, and tip apex radius of about 50 nm.

Image of FIG. 2.
FIG. 2.

SEM image of the periodical trench with a pitch width of 10 μm.

Image of FIG. 3.
FIG. 3.

The measured (a) top view of the periodical trench microstructure image in the profile characteristics direction, (b) two-dimensional view of the structure profile, and (c) detailed zoom with a range of 100 μm.

Image of FIG. 4.
FIG. 4.

(a) SEM image of the deep trench microstructure with a trench depth of 23 μm and a trench opening width of 100 μm, (b) the measured three-dimensional image of a single deep trench by the new STM, and (c) one cross-sectional profile of the measured deep trench structure.

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/content/aip/journal/rsi/83/5/10.1063/1.4721273
2012-05-22
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Note: Long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope
http://aip.metastore.ingenta.com/content/aip/journal/rsi/83/5/10.1063/1.4721273
10.1063/1.4721273
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