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(a) Schematic view of the new STM system for long range and high depth surface topography measurement and (b) scanning electron microscope (SEM) images of the self-developed STM probe with a high aspect ratio of 8:1, a effective length of approximately 400 μm, and tip apex radius of about 50 nm.
SEM image of the periodical trench with a pitch width of 10 μm.
The measured (a) top view of the periodical trench microstructure image in the profile characteristics direction, (b) two-dimensional view of the structure profile, and (c) detailed zoom with a range of 100 μm.
(a) SEM image of the deep trench microstructure with a trench depth of 23 μm and a trench opening width of 100 μm, (b) the measured three-dimensional image of a single deep trench by the new STM, and (c) one cross-sectional profile of the measured deep trench structure.
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