System diagram showing the main components of the in situ ALD reactor.
Schematic diagram of ALD chamber section.
Schematic diagrams of the sample stage showing the different parts for sample transfer and heating.
Schematic diagram of the portable ALD reactor system, showing the major components, as ready to be installed.
Simulated water concentration profile inside chambers of different configurations and nitrogen purging conditions. (a) Simple cylinder with 50 sccm nitrogen flow at the inlet. (b) Chamber with transfer arm using 50 sccm nitrogen at the inlet and no nitrogen flow in the transfer arm. (c) Chamber with transfer arm using 50 sccm nitrogen at the inlet and 50 sccm nitrogen through the transfer arm. The color scale shows the water concentration (C) normalized to the maximum concentration, C0.
Simulated water concentration at different nitrogen purging conditions (a) at the inlet and (b) next to the sample surface. The insets are magnifications to distinguish the water concentrations at later times, when the concentrations are low. The water concentrations at the sample after water dose are fitted to the exponentially decay function. Time constants (τ) for all conditions are shown in (c).
Pt 4f synchrotron radiation photoemission spectrum of 30 cycles platinum ALD grown at 300 °C in the in situ ALD chamber. The spectra were collected at BL8-1 of SSRL using 154 eV beam energy.
C 1s and O 1s synchrotron radiation photoemission spectra after half cycle reactions of platinum ALD, collected at SSRL's BL10-1 using beam energies of 410 eV and 650 eV, respectively.
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