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Portable atomic layer deposition reactor for in situ synchrotron photoemission studies
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10.1063/1.4773230
/content/aip/journal/rsi/84/1/10.1063/1.4773230
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/1/10.1063/1.4773230
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

System diagram showing the main components of the in situ ALD reactor.

Image of FIG. 2.
FIG. 2.

Schematic diagram of ALD chamber section.

Image of FIG. 3.
FIG. 3.

Schematic diagrams of the sample stage showing the different parts for sample transfer and heating.

Image of FIG. 4.
FIG. 4.

Schematic diagram of the portable ALD reactor system, showing the major components, as ready to be installed.

Image of FIG. 5.
FIG. 5.

Simulated water concentration profile inside chambers of different configurations and nitrogen purging conditions. (a) Simple cylinder with 50 sccm nitrogen flow at the inlet. (b) Chamber with transfer arm using 50 sccm nitrogen at the inlet and no nitrogen flow in the transfer arm. (c) Chamber with transfer arm using 50 sccm nitrogen at the inlet and 50 sccm nitrogen through the transfer arm. The color scale shows the water concentration (C) normalized to the maximum concentration, C0.

Image of FIG. 6.
FIG. 6.

Simulated water concentration at different nitrogen purging conditions (a) at the inlet and (b) next to the sample surface. The insets are magnifications to distinguish the water concentrations at later times, when the concentrations are low. The water concentrations at the sample after water dose are fitted to the exponentially decay function. Time constants (τ) for all conditions are shown in (c).

Image of FIG. 7.
FIG. 7.

Pt 4f synchrotron radiation photoemission spectrum of 30 cycles platinum ALD grown at 300 °C in the in situ ALD chamber. The spectra were collected at BL8-1 of SSRL using 154 eV beam energy.

Image of FIG. 8.
FIG. 8.

C 1s and O 1s synchrotron radiation photoemission spectra after half cycle reactions of platinum ALD, collected at SSRL's BL10-1 using beam energies of 410 eV and 650 eV, respectively.

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/content/aip/journal/rsi/84/1/10.1063/1.4773230
2013-01-04
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Portable atomic layer deposition reactor for in situ synchrotron photoemission studies
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/1/10.1063/1.4773230
10.1063/1.4773230
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