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Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
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10.1063/1.4776191
/content/aip/journal/rsi/84/1/10.1063/1.4776191
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/1/10.1063/1.4776191

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the real time CD control strategy.

Image of FIG. 2.
FIG. 2.

Experimental setup.

Image of FIG. 3.
FIG. 3.

Schematic diagram of proposed rotating polarizer spectroscopic ellipsometer.

Image of FIG. 4.
FIG. 4.

Controlled response with respect to reference signals. (a) log(tanΨ). (b) cos Δ.

Image of FIG. 5.
FIG. 5.

Comparison between controlled and uncontrolled responses. (a) log (tanΨ). (b) cosΔ.

Image of FIG. 6.
FIG. 6.

Signature profile MSE of controlled and uncontrolled wafer with respect to reference wafer.

Tables

Generic image for table
Table I.

Changes in MSElog(tanΨ), MSEcosΔ, and Tnew during one PEB cycle (K = 2000).

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/content/aip/journal/rsi/84/1/10.1063/1.4776191
2013-01-23
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/1/10.1063/1.4776191
10.1063/1.4776191
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