Schematic diagram of the real time CD control strategy.
Schematic diagram of proposed rotating polarizer spectroscopic ellipsometer.
Controlled response with respect to reference signals. (a) log(tanΨ). (b) cos Δ.
Comparison between controlled and uncontrolled responses. (a) log (tanΨ). (b) cosΔ.
Signature profile MSE of controlled and uncontrolled wafer with respect to reference wafer.
Changes in MSElog(tanΨ), MSEcosΔ, and Tnew during one PEB cycle (K = 2000).
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