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Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography
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FIG. 1.

Overview of the experimental setup. (a) Schematic of the setup, key components are labeled. Capacitive sensor is placed ∼13 mm below the interferometer and is used as a reference. (b) Interference pattern was measured as a function of linear displacement of a cylinder. (c) Topographic image of the surface of a cylinder was obtained by the ZYGO stitching interferometer. Cylindrical curvature was subtracted to get correct values of the surface roughness.

Image of FIG. 2.

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FIG. 2.

Schematic illustration of centering and radial errors. When the gap between the sensor and the surface of a circle is measured as a function of rotation angle: (a) centering error is present when the center of a circle deviates from the center of rotation. (b) The sinusoidal curve in displacement versus angle represents centering error. Any deviation from the curve corresponds to radial error.

Image of FIG. 3.

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FIG. 3.

Interferometer feedback. (a) The coordinates relation between the interferometer and XY linear stages used to correct rotational errors. (b) Diagram of an algorithm used for the feedback. Piezo stick-slip motors (Attocube, see XY linear stage in Fig. 1(a) ) adjust the position of a cylinder to compensate for any angular deviations.

Image of FIG. 4.

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FIG. 4.

Experimental results. (a) Interferometer output and (b) capacitive sensor reading as a function of angle with the feedback correction enabled. The DC output of interferometer is maintained within the tolerance value of 0.1 V. Sine curve fit (red curve) in (b) shows excellent agreement with the capacitive sensor output. (c) Zoom-in of (b) demonstrates fine structures in the data (black curve). The solid blue curve was taken without active feedback assistance containing significant radial errors; ∼200 nm amplitude periodic oscillations are due to intrinsic properties of the stage when performing rotational motion (d) Radial error distribution of the black curve in (c) shows ∼40 nm FWHM.

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/content/aip/journal/rsi/84/3/10.1063/1.4798546
2013-03-29
2014-04-17

Abstract

We have constructed a compact prototype apparatus for active correction of circle of confusion during rotational motion. Our system combines fiber optic interferometry as a sensing element, the reference cylinder along with the nanopositioning system, and a robust correction algorithm. We demonstrate dynamic correction of run-out errors down to 40 nm; the resolution is limited by ambient environment and accuracy of correcting nanopositioners. Our approach provides a compact solution for in-vacuum scanning nanotomography x-ray experiments with a potential to reach sub-nm level of correction.

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Scitation: Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/3/10.1063/1.4798546
10.1063/1.4798546
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