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Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography
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/content/aip/journal/rsi/84/3/10.1063/1.4798546
2013-03-29
2014-10-25

Abstract

We have constructed a compact prototype apparatus for active correction of circle of confusion during rotational motion. Our system combines fiber optic interferometry as a sensing element, the reference cylinder along with the nanopositioning system, and a robust correction algorithm. We demonstrate dynamic correction of run-out errors down to 40 nm; the resolution is limited by ambient environment and accuracy of correcting nanopositioners. Our approach provides a compact solution for in-vacuum scanning nanotomography x-ray experiments with a potential to reach sub-nm level of correction.

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Scitation: Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/3/10.1063/1.4798546
10.1063/1.4798546
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