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Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography
5.H. C. Kang, H. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, Appl. Phys. Lett. 92, 221114 (2008).
6.H. Yan, V. Rose, D. Shu, E. Lima, H. C. Kang, R. Conley, C. Liu, N. Jahedi, A. T. Macrander, G. B. Stephenson, M. Holt, Y. S. Chu, M. Lu, and J. Maser, Opt. Express 19, 15069 (2011).
10.E. Nazaretski, K. S. Graham, J. D. Thompson, J. A. Wright, D. V. Pelekhov, P. C. Hammel, and R. Movshovich, Rev. Sci. Instrum. 80, 083704 (2009).
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We have constructed a compact prototype apparatus for active correction of circle of confusion during rotational motion. Our system combines fiber optic interferometry as a sensing element, the reference cylinder along with the nanopositioning system, and a robust correction algorithm. We demonstrate dynamic correction of run-out errors down to 40 nm; the resolution is limited by ambient environment and accuracy of correcting nanopositioners. Our approach provides a compact solution for in-vacuum scanning nanotomography x-ray experiments with a potential to reach sub-nm level of correction.
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