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An example of the 2D PEBG composed by superimposing two single track APBCs. One cell representing one bit of the binary code consists of three sections and six segments.
New configuration of APBC for the compensation of nonlinearity error. In the intensity profile of the absolute position scale, the intensity values around each data pixel (I i ,−2, …, I i ,2) have a non-ideal sinusoidal shape and the phase difference of π/3.
Schematic diagram of the experimental setup for performance evaluation of the absolute planar position measurement method.
Comparison of the readouts of the APPMS and the laser interferometer when they measured the circular trajectory of 100 nm radius.
Comparison of the nonlinearity error before and after applying the compensation methods. Because the nonlinearity error in each axis showed similar result, the evaluation result in only one-axis is presented.
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