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Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating
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10.1063/1.4803184
/content/aip/journal/rsi/84/5/10.1063/1.4803184
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4803184
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

An example of the 2D PEBG composed by superimposing two single track APBCs. One cell representing one bit of the binary code consists of three sections and six segments.

Image of FIG. 2.
FIG. 2.

New configuration of APBC for the compensation of nonlinearity error. In the intensity profile of the absolute position scale, the intensity values around each data pixel ( , …, ) have a non-ideal sinusoidal shape and the phase difference of π/3.

Image of FIG. 3.
FIG. 3.

Schematic diagram of the experimental setup for performance evaluation of the absolute planar position measurement method.

Image of FIG. 4.
FIG. 4.

Comparison of the readouts of the APPMS and the laser interferometer when they measured the circular trajectory of 100 nm radius.

Image of FIG. 5.
FIG. 5.

Comparison of the nonlinearity error before and after applying the compensation methods. Because the nonlinearity error in each axis showed similar result, the evaluation result in only one-axis is presented.

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/content/aip/journal/rsi/84/5/10.1063/1.4803184
2013-05-01
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4803184
10.1063/1.4803184
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