(a) A radial flexure; (b) a rotary stage composed of three radial flexures.
(a) A multi-stage compound radial flexure (MCRF) composed of two basic modules; (b) basic module.
Illustrations of (a) actuating, (b) radial clearance of VCM, and (c) sensing principles of the rotary stage. F represents the driving direction.
Deformation result of static structural FEA simulation. F is the direction of the applied force. To improve the out-of-plane stiffness, three sets of secondary stages #1, #2, and #3 are connected by links, respectively.
A prototype of the rotary micropositioning stage. It is driven by a linear voice coil motor (VCM) through a cartwheel flexure. The dominant output motion is measured by laser sensor #1. The center shift is measured by laser sensor #2 along x and y directions.
Experimental results of (a) rotational range, (b) center shift in x and y directions, and (c) center shift in xy plane.
Open-loop frequency response of the rotary stage. (a) Magnitude plot; (b) phase plot.
Block diagram of the rotary micropositioning control system.
Positioning results of (a) 1° step rotation response and (b) 2 μrad consecutive step response.
(a) Sinusoidal tracking results and (b) tracking errors of PID control.
Open-loop and closed-loop hysteresis curves of the rotary stage.
Closed-loop frequency response of the micropositioning system. (a) Magnitude plot; (b) phase plot.
Main parameters of a rotary micropositioning stage. I: architecture; II: material; III: VCM actuator.
Performances of the rotary stage evaluated by analytical models and FEA simulations (model error is calculated with respect to FEA result).
Performance comparison of typical rotary micropositioning stages.
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