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Design and implementation of a novel rotary micropositioning system driven by linear voice coil motor
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Image of FIG. 1.
FIG. 1.

(a) A radial flexure; (b) a rotary stage composed of three radial flexures.

Image of FIG. 2.
FIG. 2.

(a) A multi-stage compound radial flexure (MCRF) composed of two basic modules; (b) basic module.

Image of FIG. 3.
FIG. 3.

Illustrations of (a) actuating, (b) radial clearance of VCM, and (c) sensing principles of the rotary stage. represents the driving direction.

Image of FIG. 4.
FIG. 4.

Deformation result of static structural FEA simulation. is the direction of the applied force. To improve the out-of-plane stiffness, three sets of secondary stages #1, #2, and #3 are connected by links, respectively.

Image of FIG. 5.
FIG. 5.

A prototype of the rotary micropositioning stage. It is driven by a linear voice coil motor (VCM) through a cartwheel flexure. The dominant output motion is measured by laser sensor #1. The center shift is measured by laser sensor #2 along and directions.

Image of FIG. 6.
FIG. 6.

Experimental results of (a) rotational range, (b) center shift in and directions, and (c) center shift in plane.

Image of FIG. 7.
FIG. 7.

Open-loop frequency response of the rotary stage. (a) Magnitude plot; (b) phase plot.

Image of FIG. 8.
FIG. 8.

Block diagram of the rotary micropositioning control system.

Image of FIG. 9.
FIG. 9.

Positioning results of (a) 1° step rotation response and (b) 2 μrad consecutive step response.

Image of FIG. 10.
FIG. 10.

(a) Sinusoidal tracking results and (b) tracking errors of PID control.

Image of FIG. 11.
FIG. 11.

Open-loop and closed-loop hysteresis curves of the rotary stage.

Image of FIG. 12.
FIG. 12.

Closed-loop frequency response of the micropositioning system. (a) Magnitude plot; (b) phase plot.


Generic image for table
Table I.

Main parameters of a rotary micropositioning stage. I: architecture; II: material; III: VCM actuator.

Generic image for table
Table II.

Performances of the rotary stage evaluated by analytical models and FEA simulations (model error is calculated with respect to FEA result).

Generic image for table
Table III.

Performance comparison of typical rotary micropositioning stages.


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Scitation: Design and implementation of a novel rotary micropositioning system driven by linear voice coil motor