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Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range
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10.1063/1.4803672
/content/aip/journal/rsi/84/5/10.1063/1.4803672
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4803672

Figures

Image of FIG. 1.
FIG. 1.

Scheme of interferometric system.

Image of FIG. 2.
FIG. 2.

Optical path of the folded Fabry-Perot interferometer.

Image of FIG. 3.
FIG. 3.

Simulation of the interferometric intensity distribution.

Image of FIG. 4.
FIG. 4.

Lissajou figure of interferometric signals: (a) Initial position and (b) 500 mm from the initial position.

Image of FIG. 5.
FIG. 5.

Testing of interferometric signals versus cavity length.

Image of FIG. 6.
FIG. 6.

The effect simulation of the waveplate's tolerance.

Image of FIG. 7.
FIG. 7.

Analysis of the interpolation error due to the waveplate's tolerance.

Image of FIG. 8.
FIG. 8.

The structure of the sensor head module.

Image of FIG. 9.
FIG. 9.

Laser and signal processing module.

Image of FIG. 10.
FIG. 10.

AGC and DC offset compensation module.

Image of FIG. 11.
FIG. 11.

Compensation testing.

Image of FIG. 12.
FIG. 12.

Structure of the sensor head.

Image of FIG. 13.
FIG. 13.

Resolution testing with the interval of 1.25 nm.

Image of FIG. 14.
FIG. 14.

Resolution testing with the interval of 2.5 nm.

Image of FIG. 15.
FIG. 15.

Resolution testing with the interval of 5 nm.

Image of FIG. 16.
FIG. 16.

Resolution testing with the interval of 7.5 nm.

Image of FIG. 17.
FIG. 17.

Stability testing (short-term: 50 min).

Image of FIG. 18.
FIG. 18.

Stability testing (long-term: 6 h).

Image of FIG. 19.
FIG. 19.

Arrangement of two interferometric systems.

Image of FIG. 20.
FIG. 20.

Comparison measurements in the range of 10 mm.

Image of FIG. 21.
FIG. 21.

Comparison measurements in the range of 500 mm.

Tables

Generic image for table
Table I.

Standard deviation of the measurement results.

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/content/aip/journal/rsi/84/5/10.1063/1.4803672
2013-05-14
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4803672
10.1063/1.4803672
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