Scheme of interferometric system.
Optical path of the folded Fabry-Perot interferometer.
Simulation of the interferometric intensity distribution.
Lissajou figure of interferometric signals: (a) Initial position and (b) 500 mm from the initial position.
Testing of interferometric signals versus cavity length.
The effect simulation of the waveplate's tolerance.
Analysis of the interpolation error due to the waveplate's tolerance.
The structure of the sensor head module.
Laser and signal processing module.
AGC and DC offset compensation module.
Structure of the sensor head.
Resolution testing with the interval of 1.25 nm.
Resolution testing with the interval of 2.5 nm.
Resolution testing with the interval of 5 nm.
Resolution testing with the interval of 7.5 nm.
Stability testing (short-term: 50 min).
Stability testing (long-term: 6 h).
Arrangement of two interferometric systems.
Comparison measurements in the range of 10 mm.
Comparison measurements in the range of 500 mm.
Standard deviation of the measurement results.
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