Schematic of oblique observation with ideal thin lens. Reflected light enters the surrounding part of lens.
Schematic of two-stage-imaging ellipsometric-contrast microscope.
Optical system in oblique observation. Upper and lower images are top and side views of optical system. System consists of infinity-corrected optical system and distance between two objective lenses is a. Green square is object and blue trapezoid is object image.
(a) Square object whose sides are 2l. (b) Object image observed in oblique observation system. Shape is trapezoid. Upper base, lower base, and width are z 1′, z 2′, and d′.
Calculated results for normalized light intensity at different film thicknesses. (a) Normalized light intensity at 0–400 nm. (b) Normalized light intensity at 0–20 nm.
Schematic of TIEM in experimental setup.
(a) Schematic of captured image of slanted edge. Bright region is edge pattern and dark region is substrate. Each small square is pixel of imaging sensor. (b) Light intensity at different positions. Red circles, blue squares, green triangles, and purple stars correspond to same diagrams as in (a). (c) Re-plotted light intensity at different positions. Each data point is plotted to have same period.
MTFs at different spatial frequencies. Red diamonds are horizontal MTFs and blue circles are vertical MTFs.
Object image of square pattern of 100 × 100 μm2 observed by TIEM.
Experimental results for normalized light intensity at different film thicknesses. Red diamonds are average light intensities at film thicknesses. All data are normalized with substrate images. Solid line is the approximation line for experimental data passing through origin.
Ellipsometric angles calculated and measured by TIEM for silicon oxide films with different thicknesses. (a) and (b) are ellipsometric angle, Ψ and Δ, respectively.
Lengths in trapezoid pattern (μm) and ratios (a.u.) in theory and experiment.
Article metrics loading...
Full text loading...