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Theoretical and experimental study on two-stage-imaging microscopy using ellipsometric contrast for real-time visualization of molecularly thin films
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10.1063/1.4804633
/content/aip/journal/rsi/84/5/10.1063/1.4804633
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4804633

Figures

Image of FIG. 1.
FIG. 1.

Schematic of oblique observation with ideal thin lens. Reflected light enters the surrounding part of lens.

Image of FIG. 2.
FIG. 2.

Schematic of two-stage-imaging ellipsometric-contrast microscope.

Image of FIG. 3.
FIG. 3.

Optical system in oblique observation. Upper and lower images are top and side views of optical system. System consists of infinity-corrected optical system and distance between two objective lenses is . Green square is object and blue trapezoid is object image.

Image of FIG. 4.
FIG. 4.

(a) Square object whose sides are 2. (b) Object image observed in oblique observation system. Shape is trapezoid. Upper base, lower base, and width are ′, ′, and ′.

Image of FIG. 5.
FIG. 5.

Calculated results for normalized light intensity at different film thicknesses. (a) Normalized light intensity at 0–400 nm. (b) Normalized light intensity at 0–20 nm.

Image of FIG. 6.
FIG. 6.

Schematic of TIEM in experimental setup.

Image of FIG. 7.
FIG. 7.

(a) Schematic of captured image of slanted edge. Bright region is edge pattern and dark region is substrate. Each small square is pixel of imaging sensor. (b) Light intensity at different positions. Red circles, blue squares, green triangles, and purple stars correspond to same diagrams as in (a). (c) Re-plotted light intensity at different positions. Each data point is plotted to have same period.

Image of FIG. 8.
FIG. 8.

MTFs at different spatial frequencies. Red diamonds are horizontal MTFs and blue circles are vertical MTFs.

Image of FIG. 9.
FIG. 9.

Object image of square pattern of 100 × 100 m observed by TIEM.

Image of FIG. 10.
FIG. 10.

Experimental results for normalized light intensity at different film thicknesses. Red diamonds are average light intensities at film thicknesses. All data are normalized with substrate images. Solid line is the approximation line for experimental data passing through origin.

Image of FIG. 11.
FIG. 11.

Ellipsometric angles calculated and measured by TIEM for silicon oxide films with different thicknesses. (a) and (b) are ellipsometric angle, Ψ and Δ, respectively.

Tables

Generic image for table
Table I.

Lengths in trapezoid pattern (m) and ratios (a.u.) in theory and experiment.

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/content/aip/journal/rsi/84/5/10.1063/1.4804633
2013-05-16
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Theoretical and experimental study on two-stage-imaging microscopy using ellipsometric contrast for real-time visualization of molecularly thin films
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4804633
10.1063/1.4804633
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